Surface profile measurement by grating projection method with dual-projection optics

2005 ◽  
Author(s):  
Masayuki Yamamoto ◽  
Toru Yoshizawa
Keyword(s):  
Projection Method ◽  
Surface Profile ◽  
Profile Measurement ◽  
Dual Projection ◽  
Projection Optics ◽  
Surface Profile Measurement

scholarly journals Surface Profile Measurement of Specular Objects by Grating Projection Method.

1998 ◽  
Vol 64 (8) ◽  
pp. 1171-1175 ◽  
Author(s):  
Masayuki YAMAMOTO ◽  
Masahito TONOOKA ◽  
Yukitoshi OTANI ◽  
Toru YOSHIZAWA
Keyword(s):  
Projection Method ◽  
Surface Profile ◽  
Profile Measurement ◽  
Specular Objects ◽  
Surface Profile Measurement

scholarly journals Surface Profile Measurement by Phase and Contrast Detection using Grating Projection Method.

2000 ◽  
Vol 66 (1) ◽  
pp. 132-136
Author(s):  
Masahito TONOOKA ◽  
Masayuki YAMAMOTO ◽  
Yukitoshi OTANI ◽  
Toru YOSHIZAWA ◽  
Mitsuhiro ISHIHARA ◽  
...  
Keyword(s):  
Projection Method ◽  
Surface Profile ◽  
Profile Measurement ◽  
Contrast Detection ◽  
Surface Profile Measurement
Sign in / Sign up

Export Citation Format

Share Document