Characterization of plumes produced during ultrashort laser ablation of metals and semiconductors

2005 ◽  
Author(s):  
Salvatore Amoruso ◽  
Marco Vitiello
Author(s):  
Nancy Van Suetendael ◽  
Kristie Powell ◽  
Susan Earles ◽  
Mary Helen McCay ◽  
Ivica Kostanic
Keyword(s):  

Author(s):  
P. Schwindenhammer ◽  
H. Murray ◽  
P. Descamps ◽  
P. Poirier

Abstract Decapsulation of complex semiconductor packages for failure analysis is enhanced by laser ablation. If lasers are potentially dangerous for Integrated Circuits (IC) surface they also generate a thermal elevation of the package during the ablation process. During measurement of this temperature it was observed another and unexpected electrical phenomenon in the IC induced by laser. It is demonstrated that this new phenomenon is not thermally induced and occurs under certain ablation conditions.


2014 ◽  
Vol 115 (24) ◽  
pp. 243301 ◽  
Author(s):  
N. Tsakiris ◽  
K. K. Anoop ◽  
G. Ausanio ◽  
M. Gill-Comeau ◽  
R. Bruzzese ◽  
...  

2018 ◽  
Vol 139 ◽  
pp. 75-82 ◽  
Author(s):  
A.H. Galmed ◽  
A. du Plessis ◽  
S.G. le Roux ◽  
E. Hartnick ◽  
H. Von Bergmann ◽  
...  

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