3D surface profilometry for both static and dynamic nanoscale full field characterization of AFM micro cantilever beams
2010 ◽
Vol 21
(6)
◽
pp. 065301
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Keyword(s):
Keyword(s):
2017 ◽
Vol 35
(13)
◽
pp. 2541-2547
◽
Keyword(s):
Keyword(s):