Influences of post-deposition annealing on the properties of the ZrO2 thin films prepared by electron beam evaporation

2004 ◽  
Author(s):  
S. Y. Shao ◽  
Jian D. Shao ◽  
D. P. Zhang ◽  
J. B. Huang ◽  
Zheng X. Fan
Keyword(s):  
Thin Films ◽  
Electron Beam ◽  
Electron Beam Evaporation ◽  
Post Deposition Annealing ◽  
Post Deposition

Microstructure of and Crystal Defects in Nanocrystalline Tin Dioxide Thin Films

1997 ◽  
Vol 472 ◽  
Author(s):  
X. Pan ◽  
J.G. Zheng
Keyword(s):  
Thin Films ◽  
Electronic Structure ◽  
Electron Beam ◽  
Tin Dioxide ◽  
Stoichiometric Composition ◽  
Electron Beam Evaporation ◽  
Crystal Defects ◽  
Post Deposition Annealing ◽  
Local Composition ◽  
Post Deposition

ABSTRACTNanocrystalline SnO2 thin films, prepared by electron beam evaporation from high purity SnO2 and post deposition annealing in air at 700°C with different times, were investigated using HRTEM. The films are composed of nanocrystalline SnO2 crystallites and pores. Many of the crystallites consist of crystal defects, such as crystallographic shearing planes (CSPs), dislocations and twin boundaries (TBs). Atomistic structures of these defects were investigated. These defects interact with each other, resulting in different configurations of crystallites. The local composition at CSP and TB steps at dislocation cores varies with the type of dislocations and CSPs and is different from the stoichiometric composition of SnO2. Thus, the electronic structure at these defects is different from that of the perfect SnO2.

The effects of post-deposition annealing on the microstructure of electron-beam evaporated indium tin oxide thin films

1994 ◽  
Vol 5 (1-4) ◽  
pp. 209-211 ◽  
Author(s):  
A.S.A.C. Diniz ◽  
C.J. Kiely ◽  
I. Elfalla ◽  
R.D. Pilkington ◽  
A.E. Hill
Keyword(s):  
Thin Films ◽  
Electron Beam ◽  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Oxide Thin Films ◽  
Post Deposition Annealing ◽  
Post Deposition

AlN thin films fabricated by ultra-high vacuum electron-beam evaporation with ammonia for silicon-on-insulator application

2005 ◽  
Vol 239 (3-4) ◽  
pp. 327-334 ◽  
Author(s):  
Ming Zhu ◽  
Peng Chen ◽  
Ricky K.Y. Fu ◽  
Weili Liu ◽  
Chenglu Lin ◽  
...  
Keyword(s):  
Thin Films ◽  
Electron Beam ◽  
High Vacuum ◽  
Electron Beam Evaporation ◽  
Silicon On Insulator ◽  
Ultra High Vacuum

scholarly journals Post-Deposition Annealing Analysis for HfO[sub 2] Thin Films Using GIXRR∕GIXRD

2009 ◽  
Author(s):  
Wei-En Fu ◽  
Yong-Qing Chang ◽  
Yi-Ching Chen ◽  
Erik M. Secula ◽  
David G. Seiler ◽  
...  
Keyword(s):  
Thin Films ◽  
Post Deposition Annealing ◽  
Post Deposition
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