Raman and photoluminescence characterization of AlGaAs multiple-quantum-well structures formed by focused-ion-beam implantation

1992 ◽  
Author(s):  
Howard E. Jackson ◽  
Ahn G. Choo ◽  
Bernard L. Weiss ◽  
Joseph T. Boyd ◽  
Andrew J. Steckl ◽  
...  
1993 ◽  
Vol 324 ◽  
Author(s):  
Ahn Goo Choo ◽  
Xuelong. Cao ◽  
Spirit Tlali ◽  
Howard E. Jackson ◽  
Peter Chen ◽  
...  

AbstractRaman and photoluminescence (PL) spectra have been used to characterize A10.3Ga0.7As/GaAs multiple quantum well (MQW) structures that have been patterned by focused ion beam (FIB) implantation followed by rapid thermal annealing (RTA). Microprobe Raman scattering is used to identify the appropriate RTA and FIB implantation conditions that provide for removal of implantation-induced damage and for compositional intermixing. FIB patterned wire-like structures are characterized by spatially resolved PL spectra.


1992 ◽  
Vol 281 ◽  
Author(s):  
Mukesh Kumar ◽  
Gregory N. De Brabander ◽  
Peter Chen ◽  
Joseph T. Boyd ◽  
Andrew J. Steckl ◽  
...  

ABSTRACTOptical channel waveguiding in AlGaAs multiple quantum well structures formed by compositional mixing implemented by focused ion beam (FIB) implantation is demonstrated. To achieve selective mixing, Si is FIB implanted with a dose of 5×1014 cm−2 followed by RTA at 950°C for 10 s. Raman microprobe spectra are used to characterize the lateral variation of mixing. Propagation loss in a channel waveguide is measured. Measurement of the waveguide mode field distribution allows for the determination of changes in refractive index due to mixing and an approximate mixing depth.


1993 ◽  
Vol 73 (12) ◽  
pp. 8489-8494 ◽  
Author(s):  
J. M. Zavada ◽  
F. Voillot ◽  
N. Lauret ◽  
R. G. Wilson ◽  
B. Theys

2000 ◽  
Vol 39 (Part 1, No. 10) ◽  
pp. 5781-5787 ◽  
Author(s):  
Kestutis Jarasiunas ◽  
Vygantas Mizeikis ◽  
Satoshi Iwamoto ◽  
Masao Nishioka ◽  
Takao Someya ◽  
...  

2002 ◽  
Vol 389-393 ◽  
pp. 1497-1500
Author(s):  
Chien-Rong Lu ◽  
Jia Ren Lee ◽  
Yo-Yu Chen ◽  
Wei I Lee ◽  
Shih-Chang Lee

2008 ◽  
Vol 93 (11) ◽  
pp. 111906 ◽  
Author(s):  
L. Lahourcade ◽  
P. K. Kandaswamy ◽  
J. Renard ◽  
P. Ruterana ◽  
H. Machhadani ◽  
...  

Sign in / Sign up

Export Citation Format

Share Document