Dissolution behavior of resist polymers studied using quartz crystal microbalance method

Dissolution behavior of resist polymers studied by Quartz-Crystal-Microbalance method II

10.1117/12.711926 ◽

2007 ◽

Cited By ~ 2

Author(s):

Minoru Toriumi ◽

Fumihiko Okabe ◽

Masahiko Kitayama

Keyword(s):

Quartz Crystal Microbalance ◽

Quartz Crystal ◽

Dissolution Behavior

Download Full-text

Dissolution behavior of negative-type photoresists for display manufacture studied by quartz crystal microbalance method

Japanese Journal of Applied Physics ◽

10.7567/jjap.57.046501 ◽

2018 ◽

Vol 57 (4) ◽

pp. 046501 ◽

Cited By ~ 1

Author(s):

Asuka Tsuneishi ◽

Sachiyo Uchiyama ◽

Takahiro Kozawa

Keyword(s):

Quartz Crystal Microbalance ◽

Quartz Crystal ◽

Dissolution Behavior ◽

Negative Type

Download Full-text

Effects of low-molecular weight resist components on dissolution behavior of chemically amplified resists for extreme ultraviolet lithography studied by quartz crystal microbalance

10.1117/12.2085482 ◽

2015 ◽

Author(s):

Masaki Mitsuyasu ◽

Hiroki Yamamoto ◽

Takahiro Kozawa

Keyword(s):

Molecular Weight ◽

Quartz Crystal Microbalance ◽

Quartz Crystal ◽

Extreme Ultraviolet ◽

Dissolution Behavior ◽

Low Molecular Weight ◽

Extreme Ultraviolet Lithography ◽

Ultraviolet Lithography ◽

Chemically Amplified ◽

Chemically Amplified Resists

Download Full-text

Study on dissolution behavior of polymer-bound and polymer-blended photo acid generator (PAG) resists by using quartz crystal microbalance (QCM) method

Microelectronic Engineering ◽

10.1016/j.mee.2014.07.019 ◽

2014 ◽

Vol 129 ◽

pp. 65-69 ◽

Cited By ~ 9

Author(s):

Hiroki Yamamoto ◽

Takahiro Kozawa ◽

Seiichi Tagawa

Keyword(s):

Quartz Crystal Microbalance ◽

Quartz Crystal ◽

Dissolution Behavior ◽

Photo Acid Generator

Download Full-text

Dissolution behavior of phenolic resins and resists as studied by quartz crystal microbalance

10.1117/12.275860 ◽

1997 ◽

Cited By ~ 2

Author(s):

Hiroshi Ito ◽

Debra Fenzel-Alexander ◽

Gregory Breyta

Keyword(s):

Quartz Crystal Microbalance ◽

Quartz Crystal ◽

Dissolution Behavior ◽

Phenolic Resins

Download Full-text

Fundamental study on dissolution behavior of poly(methyl methacrylate) by quartz crystal microbalance

10.1117/12.2218965 ◽

2016 ◽

Cited By ~ 1

Author(s):

Akihiro Konda ◽

Hiroki Yamamoto ◽

Shusuke Yoshitake ◽

Takahiro Kozawa

Keyword(s):

Methyl Methacrylate ◽

Quartz Crystal Microbalance ◽

Quartz Crystal ◽

Dissolution Behavior ◽

Fundamental Study ◽

Poly Methyl Methacrylate

Download Full-text

Electrochemical scanning tunneling microscopy and electrochemical quartz crystal microbalance study of the adsorption of phenanthraquinone accompanied by an electrochemical redox reaction on the Au electrode

Journal of Electroanalytical Chemistry ◽

10.1016/s0022-0728(97)00399-9 ◽

1997 ◽

Vol 440 (1-2) ◽

pp. 65-72

Author(s):

Y He

Keyword(s):

Scanning Tunneling Microscopy ◽

Quartz Crystal Microbalance ◽

Redox Reaction ◽

Quartz Crystal ◽

Electrochemical Quartz Crystal Microbalance ◽

Scanning Tunneling ◽

Tunneling Microscopy ◽

Au Electrode ◽

Electrochemical Scanning Tunneling Microscopy ◽

Electrochemical Redox

Download Full-text

Application of a wall jet disk electrode combined with an electrochemical quartz crystal microbalance to the study of the dissolution of copper in acidic chloride media

Journal of Electroanalytical Chemistry ◽

10.1016/s0022-0728(97)00057-0 ◽

1997 ◽

Vol 440 (1-2) ◽

pp. 139-143 ◽

Cited By ~ 6

Author(s):

M Itagaki

Keyword(s):

Quartz Crystal Microbalance ◽

Quartz Crystal ◽

Electrochemical Quartz Crystal Microbalance ◽

Wall Jet ◽

Disk Electrode ◽

Acidic Chloride

Download Full-text

Evaluation of a PAH/PSS Layer-by-Layer Deposited Film Using a Quartz-Crystal-Microbalance and Surface-Plasmon-Resonance Hybrid Sensor

IEICE Transactions on Electronics ◽

10.1587/transele.e98.c.136 ◽

2015 ◽

Vol E98.C (2) ◽

pp. 136-138 ◽

Cited By ~ 1

Author(s):

Keisuke KAWACHI ◽

Kazunari SHINBO ◽

Yasuo OHDAIRA ◽

Akira BABA ◽

Keizo KATO ◽

...

Keyword(s):

Surface Plasmon Resonance ◽

Surface Plasmon ◽

Quartz Crystal Microbalance ◽

Plasmon Resonance ◽

Quartz Crystal ◽

Layer By Layer ◽

Deposited Film ◽

Resonance Hybrid

Download Full-text

Interaction of Clear Flavor Emulsions Containing Lemon Essential Oils with Lipid Bilayers via a Quartz Crystal Microbalance

Food Science and Technology Research ◽

10.3136/fstr.25.879 ◽

2019 ◽

Vol 25 (6) ◽

pp. 879-884

Author(s):

Takahiro Sakai ◽

Hayato Seki ◽

Shogo Yoshida ◽

Hayato Hori ◽

Hisashi Suzuki ◽

...

Keyword(s):

Essential Oils ◽

Lipid Bilayers ◽

Quartz Crystal Microbalance ◽

Quartz Crystal

Download Full-text