The new technology of the materials process: microvia formation by CO 2 laser drilling machine

2005 ◽  
Author(s):  
Ming-Fei Chen ◽  
Yu-Pin Chen
Keyword(s):  
New Technology ◽  
Laser Drilling ◽  
Drilling Machine

Development of the enhanced concurrent in-line inspection system for CO2 laser drilling machine

2000 ◽  
Author(s):  
Hideaki Nagatoshi ◽  
Kazuhide Isaji ◽  
Tsutomu Sugiyama ◽  
Hidehiko Karasaki ◽  
Makoto Kato
Keyword(s):  
Laser Drilling ◽  
Inspection System ◽  
Drilling Machine

5617 Development of Laser Drilling Machine for Printed Wiring Boards

2006 ◽  
Vol 2006.7 (0) ◽  
pp. 331-332 ◽  
Author(s):  
Haruaki OTSUKI ◽  
Yasushi ITO ◽  
Hiroshi AOYAMA ◽  
Souichi TOHYAMA ◽  
Hiromu HIRAI
Keyword(s):  
Laser Drilling ◽  
Drilling Machine ◽  
Printed Wiring Boards

E11 Shape control of holes with the laser drilling machine that controls laser

2012 ◽  
Vol 2012.9 (0) ◽  
pp. 271-272
Author(s):  
Yoshimasa Yokosawa ◽  
Hirofumi Hidai ◽  
Souta Matsusaka ◽  
Noboru Morita
Keyword(s):  
Shape Control ◽  
Laser Drilling ◽  
Drilling Machine

Concurrent in-line inspection system for CO2 laser drilling machine

1999 ◽  
Author(s):  
Makoto Kato ◽  
Nobuhiro Araki ◽  
Kazuhide Isaji ◽  
Hidehiko Karasaki
Keyword(s):  
Laser Drilling ◽  
Inspection System ◽  
Drilling Machine

Method of Analyzing the Singlet F-Theta Scan Lens for Laser Drilling System

2007 ◽  
Vol 364-366 ◽  
pp. 521-526
Author(s):  
Ming Fei Chen ◽  
Yu Pin Chen ◽  
Chun Wei Hu ◽  
Chien Chuan Chen
Keyword(s):  
Laser Drilling ◽  
Scanning System ◽  
Drilling Machine ◽  
Scanning Velocity ◽  
Projection Plane ◽  
Drilling System ◽  
Simulation Results ◽  
Focusing Lens ◽  
Scanning Systems

The scanning system which uses the non-linear focusing lens is usually accompanied by a major problem that is a non-constant scanning velocity of the spots in the projection plane. Moreover, the energy of the spots and the shape of the drilling holes would be affected. Hence, the focal lens of the scanning system usually uses the f-theta lens to solve this problem. This paper proposes a method utilizing the ZEMAX to analyze the commercial F-theta lens. The results indicate the F-theta lens can increase the quality of the drilling holes and amend the projection plane. In order to verify the analysis results, each diameter of an array holes drilled by the CO2 laser drilling machine would be measured. The experimental results can demonstrate that the percentage of the variation in the diameter of holes is close to the simulation results. Therefore, the method can effectively analyze the F-theta lens of the scanning systems.

Microfabrication research at the National Submicron Facility

1983 ◽  
Vol 41 ◽  
pp. 86-89
Author(s):  
E.D. Wolf
Keyword(s):  
Integrated Circuits ◽  
Particle Physics ◽  
High Speed ◽  
New Technology ◽  
High Energy ◽  
High Energy Particle ◽  
New Science ◽  
Wide Range ◽  
Intermediate Domain ◽  
Circuit Function

Most microelectronics devices and circuits operate faster, consume less power, execute more functions and cost less per circuit function when the feature-sizes internal to the devices and circuits are made smaller. This is part of the stimulus for the Very High-Speed Integrated Circuits (VHSIC) program. There is also a need for smaller, more sensitive sensors in a wide range of disciplines that includes electrochemistry, neurophysiology and ultra-high pressure solid state research. There is often fundamental new science (and sometimes new technology) to be revealed (and used) when a basic parameter such as size is extended to new dimensions, as is evident at the two extremes of smallness and largeness, high energy particle physics and cosmology, respectively. However, there is also a very important intermediate domain of size that spans from the diameter of a small cluster of atoms up to near one micrometer which may also have just as profound effects on society as “big” physics.

Characterization of RF Sputtered ZnO Piezoelectric Films Using Transmission Electron Microscope

1975 ◽  
Vol 33 ◽  
pp. 86-87
Author(s):  
Kemining W. Yeh ◽  
Richard S. Muller ◽  
Wei-Kuo Wu ◽  
Jack Washburn
Keyword(s):  
Integrated Circuit ◽  
Acoustic Waves ◽  
New Technology ◽  
Surface Acoustic Waves ◽  
Electromechanical Properties ◽  
Leading Role ◽  
Saw Devices ◽  
Transmission Electron ◽  
High Degree

Considerable and continuing interest has been shown in the thin film transducer fabrication for surface acoustic waves (SAW) in the past few years. Due to the high degree of miniaturization, compatibility with silicon integrated circuit technology, simplicity and ease of design, this new technology has played an important role in the design of new devices for communications and signal processing. Among the commonly used piezoelectric thin films, ZnO generally yields superior electromechanical properties and is expected to play a leading role in the development of SAW devices.

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