Photostable amorphous-silicon films by low-pressure chemical vapour deposition

1992 ◽  
Author(s):  
K. K. Sharma ◽  
Claudio Manfredotti
Keyword(s):  
Amorphous Silicon ◽  
Chemical Vapour Deposition ◽  
Vapour Deposition ◽  
Chemical Vapour ◽  
Low Pressure ◽  
Silicon Films ◽  
Pressure Chemical

Silicon Films Deposited by Low-Pressure Chemical Vapour Deposition for Microsystems

2003 ◽  
Vol 93 ◽  
pp. 453-458 ◽  
Author(s):  
H. Mahfoz-Kotb ◽  
A.C. Salaün ◽  
T. Mohammed-Brahim ◽  
F. Bendriaa ◽  
F. Le Bihan ◽  
...  
Keyword(s):  
Chemical Vapour Deposition ◽  
Vapour Deposition ◽  
Chemical Vapour ◽  
Low Pressure ◽  
Silicon Films ◽  
Pressure Chemical

Ultra-low pressure chemical vapour deposition of polycrystalline and amorphous silicon

1992 ◽  
Vol 27 (2) ◽  
pp. 479-484 ◽  
Author(s):  
W. Ahmed ◽  
D. B. Meakin ◽  
J. Stoemenos ◽  
N. A. Economou ◽  
R. D. Pilkington
Keyword(s):  
Amorphous Silicon ◽  
Chemical Vapour Deposition ◽  
Vapour Deposition ◽  
Chemical Vapour ◽  
Low Pressure ◽  
Pressure Chemical

Optical and Structural Properties of Amorphous Silicon Obtained by Low Pressure Chemical Vapour Deposition

1992 ◽  
Vol 170 (1) ◽  
pp. 119-128 ◽  
Author(s):  
G. Amato ◽  
F. Fizzotti ◽  
C. Manfredotti ◽  
P. Menna ◽  
G. Nobile ◽  
...  
Keyword(s):  
Amorphous Silicon ◽  
Structural Properties ◽  
Chemical Vapour Deposition ◽  
Vapour Deposition ◽  
Chemical Vapour ◽  
Low Pressure ◽  
Pressure Chemical

Low pressure chemical vapour deposition amorphous silicon behaviour under annealing

1988 ◽  
Vol 106 (1) ◽  
pp. 11-16
Author(s):  
G. Pastor ◽  
P. Tejedor ◽  
I. Jiménez ◽  
E. Domínguez ◽  
M. Torres ◽  
...  
Keyword(s):  
Amorphous Silicon ◽  
Chemical Vapour Deposition ◽  
Vapour Deposition ◽  
Chemical Vapour ◽  
Low Pressure ◽  
Pressure Chemical

Low Pressure Chemical Vapour Deposition Amorphous Silicon Behaviour under Annealing

1988 ◽  
pp. 11-16
Author(s):  
G. Pastob ◽  
P Tejedor ◽  
I Jiménez ◽  
E . Domínguez ◽  
M. Torres ◽  
...  
Keyword(s):  
Amorphous Silicon ◽  
Chemical Vapour Deposition ◽  
Vapour Deposition ◽  
Chemical Vapour ◽  
Low Pressure ◽  
Pressure Chemical
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