Updates on the coefficient of thermal expansion property and surface finish capability of CLEARCERAM-Z series for EUVL photomask substrate application
2011 ◽
Vol 197-198
◽
pp. 436-439
2015 ◽
Vol 76
(2)
◽
pp. 279-288
◽
2012 ◽
Vol 14
(1)
◽
pp. 187-190
◽
2014 ◽
Vol 599
◽
pp. 89-92
◽
2020 ◽
Vol 253
◽
pp. 123260
◽