Damage and RTA kinetics in Ar+ and Si+ ion-implanted CZ silicon characterized by thermal wave modulated optical reflectance

1992 ◽  
Author(s):  
Sookap Hahn ◽  
Walter L. Smith ◽  
Tohru Hara ◽  
H. Hagiwara ◽  
H. Suzuki ◽  
...  
Keyword(s):  
Thermal Wave ◽  
Optical Reflectance ◽  
Ion Implanted

Dynamic behaviors of pulsed-laser annealing in ion-implanted silicon studied by measuring the optical reflectance

1979 ◽  
Author(s):  
Kouichi Murakami ◽  
Kenji Gamo ◽  
Susumu Namba ◽  
Mitsuo Kawabe ◽  
Yoshinobu Aoyagi ◽  
...  
Keyword(s):  
Laser Annealing ◽  
Pulsed Laser ◽  
Optical Reflectance ◽  
Dynamic Behaviors ◽  
Pulsed Laser Annealing ◽  
Ion Implanted

Modification of time dependence in thermal wave signal from ion implanted wafers

1993 ◽  
pp. 263-265
Author(s):  
N.O. Pearce ◽  
Z. Bokharey ◽  
D. Kamenitsa ◽  
R. Simonton ◽  
N. Tripsas ◽  
...  
Keyword(s):  
Time Dependence ◽  
Thermal Wave ◽  
Wave Signal ◽  
Ion Implanted

Thermal wave measurements in ion-implanted silicon

1990 ◽  
Vol 5 (2) ◽  
pp. 95-100
Author(s):  
G. Queirolo ◽  
C. Zaccherini ◽  
S. Frabboni
Keyword(s):  
Thermal Wave ◽  
Wave Measurements ◽  
Ion Implanted

Characterization of the Surface of Silver Ion-Implanted Silicon by Optical Reflectance

2017 ◽  
Vol 84 (5) ◽  
pp. 785-789 ◽  
Author(s):  
A. L. Stepanov ◽  
V. V. Vorobev ◽  
V. I. Nuzhdin ◽  
V. F. Valeev ◽  
Yu. N. Osin
Keyword(s):  
Silver Ion ◽  
Optical Reflectance ◽  
Ion Implanted

Non-Destructive Characterization of Activated Ion-Implanted Doping Profiles Based on Photomodulated Optical Reflectance

2011 ◽  
Author(s):  
Janusz Bogdanowicz ◽  
Trudo Clarysse ◽  
Alain Moussa ◽  
Jay Mody ◽  
Pierre Eyben ◽  
...  
Keyword(s):  
Optical Reflectance ◽  
Doping Profiles ◽  
Non Destructive ◽  
Non Destructive Characterization ◽  
Ion Implanted

Thermal wave measurement of ion implanted semiconductors in the mirage effect geometry

1992 ◽  
Vol 61 (5) ◽  
pp. 569-571
Author(s):  
A. L. Glazov ◽  
K. L. Muratikov ◽  
A. V. Suvorov
Keyword(s):  
Thermal Wave ◽  
Mirage Effect ◽  
Wave Measurement ◽  
Thermal Wave Measurement ◽  
Ion Implanted

Modification of time dependence in thermal wave signal from ion implanted wafers

1993 ◽  
Vol 74 (1-2) ◽  
pp. 263-265 ◽  
Author(s):  
N.O. Pearce ◽  
Z. Bokharey ◽  
D. Kamenitsa ◽  
R. Simonton ◽  
N. Tripsas ◽  
...  
Keyword(s):  
Time Dependence ◽  
Thermal Wave ◽  
Wave Signal ◽  
Ion Implanted
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