Simulation of technological process of microstructures etching in high-voltage gas discharge plasma

2004 ◽  
Author(s):  
Nikolay L. Kazanskiy ◽  
Vsevolod A. Kolpakov
Keyword(s):  
Technological Process ◽  
High Voltage ◽  
Discharge Plasma ◽  
Gas Discharge ◽  
Gas Discharge Plasma

Photoelectrical Properties of Semiconductor in Contact with Gas Discharge Plasma

1997 ◽  
Vol 7 (5) ◽  
pp. 1039-1044
Author(s):  
N. N. Lebedeva ◽  
V. I. Orbukh ◽  
B. G. Salamov ◽  
M. Özer ◽  
K. Çolakoǧlu ◽  
...  
Keyword(s):  
Discharge Plasma ◽  
Gas Discharge ◽  
Gas Discharge Plasma ◽  
Photoelectrical Properties

HOLOGRAPHIC TIME-DIFFERENTIAL CINE-IMERFEROMETRY OF THE GAS DISCHARGE PLASMA

1979 ◽  
Vol 40 (C7) ◽  
pp. C7-873-C7-874
Author(s):  
Yu. I. Filenko ◽  
B. M. Stepanov ◽  
L. S. Ushakov
Keyword(s):  
Discharge Plasma ◽  
Gas Discharge ◽  
Gas Discharge Plasma ◽  
Time Differential

Nonuniform gas discharge plasma

1996 ◽  
Vol 166 (11) ◽  
pp. 1197 ◽  
Author(s):  
Aleksandr V. Eletskii ◽  
Boris M. Smirnov
Keyword(s):  
Discharge Plasma ◽  
Gas Discharge ◽  
Gas Discharge Plasma ◽  
Nonuniform Gas
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