The introduction of industrial robots is an indispensable methodology in acheving factory automation. In order to advance the application technology of the robots, peripheral technology such as measurement and recognition must be developed. There are large amount of research devoted to sensing and recognition devices and systems. Assembly automation requires the accurate three dimensional position sensors, positioning systems and related sensory devices. A wide variety of optical devices have been developed for many applications. The advent of the laser has provided a coherent light source. This makes applications possible including highly accurate measurement and optical pattern recognition devices. In this paper, position detectors which use the lateral photo effect are applied to position detection and positioning for a X-Y-Z stage. Lasers (He-Ne, 632.8nm) are used for a light source and PSD's are used for light receptors. Both devices are applied efficiently to the absolute position detection of a X-Y-Z stage and to the pattern recognition.
Motor Driving Control of an X-Y-Z Table Using a Photoelectric Device and Optical Pattern Recognition