High-power laser plasma EUV light source for lithography

2004 ◽  
Author(s):  
Akira Endo
Keyword(s):  
Light Source ◽  
High Power ◽  
Laser Plasma ◽  
High Power Laser ◽  
Power Laser

scholarly journals Fabrication of disk-shaped, deuterated resorcinol/formaldehyde foam target for laser–plasma experiments

2021 ◽  
Vol 9 ◽  
Author(s):  
Yumi Kaneyasu ◽  
Keiji Nagai ◽  
Marilou Cadatal-Raduban ◽  
Daniil Golovin ◽  
Satoshi Shokita ◽  
...  
Keyword(s):  
Network Structure ◽  
High Power ◽  
Laser Plasma ◽  
Isotope Effects ◽  
Visible Region ◽  
High Power Laser ◽  
Power Laser ◽  
Resorcinol Formaldehyde ◽  
Kinetic Isotope ◽  
Laser Experiments

Abstract Resorcinol/formaldehyde (RF) foam resin is an attractive material as a low-density target in high-power laser–plasma experiments because of its fine network structure, transparency in the visible region, and low-Z element (hydrogen, carbon, and oxygen) composition. In this study, we developed disk-shaped RF foam and deuterated RF foam targets with 40–200 μm thickness and approximately 100 mg/cm3 density having a network structure from 100 nm to a few micrometers cell size. By deuteration, the polymerization rate was drastically slowed down owing to kinetic isotope effects. These targets were used in high-power laser experiments where a megaelectronvolt proton beam was successfully generated.

Coded aperture x-ray imaging of high power laser-plasma interactions on the Vulcan Laser System

2018 ◽  
Author(s):  
Robert I. Heathcote ◽  
Nicola Booth ◽  
Robert J. Clarke ◽  
Asha Anderson-Asubonteng ◽  
Matthew P. Selwood ◽  
...  
Keyword(s):  
High Power ◽  
Laser Plasma ◽  
Laser System ◽  
Coded Aperture ◽  
High Power Laser ◽  
Power Laser ◽  
Plasma Interactions ◽  
X Ray ◽  
Laser Plasma Interactions ◽  
X Ray Imaging

High-power laser-plasma x-ray source for lithography

2002 ◽  
Author(s):  
Celestino J. Gaeta ◽  
Harry Rieger ◽  
I. C. Edmond Turcu ◽  
Richard A. Forber ◽  
Kelly L. Cassidy ◽  
...  
Keyword(s):  
High Power ◽  
Laser Plasma ◽  
High Power Laser ◽  
Power Laser ◽  
X Ray

Compact high-power laser-plasma x-ray source for lithography

2001 ◽  
Author(s):  
Celestino J. Gaeta ◽  
Harry Rieger ◽  
I. C. Edmond Turcu ◽  
Richard A. Forber ◽  
S. M. Campeau ◽  
...  
Keyword(s):  
High Power ◽  
Laser Plasma ◽  
High Power Laser ◽  
Power Laser ◽  
X Ray

scholarly journals High-power laser-plasma interaction in nanosecond regimes ‘at a glance’ using proton deflectometry

2016 ◽  
Vol 717 ◽  
pp. 012036
Author(s):  
P Loiseau ◽  
A Castan ◽  
J-R Marquès ◽  
L Lancia ◽  
T Gangolf ◽  
...  
Keyword(s):  
High Power ◽  
Laser Plasma ◽  
High Power Laser ◽  
Power Laser ◽  
Plasma Interaction ◽  
Laser Plasma Interaction

scholarly journals Table-top laser-plasma acceleration as an electron radiography source

2006 ◽  
Vol 24 (1) ◽  
pp. 185-190 ◽  
Author(s):  
S.P.D. MANGLES ◽  
B.R. WALTON ◽  
Z. NAJMUDIN ◽  
A.E. DANGOR ◽  
K. KRUSHELNICK ◽  
...  
Keyword(s):  
Energy Spectrum ◽  
High Power ◽  
Laser Plasma ◽  
Magnetic Spectrometer ◽  
Plasma Acceleration ◽  
High Power Laser ◽  
Power Laser ◽  
Accelerated Electrons ◽  
Underdense Plasmas ◽  
Proof Of Principle

A “table-top” high power laser has been used to generate beams of accelerated electrons up to energy of 20 MeV from interactions with underdense plasmas. The energy spectrum of these beams was measured using a magnetic spectrometer and proof-of-principle experiments were performed to evaluate the suitability of these beams for electron radiography applications.

49‐3: High Power Laser Phosphor Light Source Using a Scanning Mirror for Projectors

2021 ◽  
Vol 52 (1) ◽  
pp. 680-682
Author(s):  
Kenneth Li ◽  
Y.P. Chang ◽  
Andy Chen ◽  
Lion Wang ◽  
Stark Tsai
Keyword(s):  
Light Source ◽  
High Power ◽  
High Power Laser ◽  
Power Laser ◽  
Scanning Mirror
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