scholarly journals Extrinsic fibre Fabry-Perot interferometer for vibration and displacement measurement: the benefit of polarization decomposition

2004 ◽  
Author(s):  
Elisabeth Ouisse ◽  
Vincent Metivier ◽  
Noel Servagent ◽  
Christian Y. Boisrobert
Keyword(s):  
Displacement Measurement ◽  
Fabry Perot

Fabry–Pérot interferometer utilized for displacement measurement in a large measuring range

2010 ◽  
Vol 81 (9) ◽  
pp. 093102 ◽  
Author(s):  
Yung-Cheng Wang ◽  
Lih-Horng Shyu ◽  
Chung-Ping Chang
Keyword(s):  
Displacement Measurement ◽  
Measuring Range ◽  
Fabry Perot

Modified Fabry-Perot interferometer for displacement measurement in ultra large measuring range

2013 ◽  
Vol 84 (5) ◽  
pp. 053105 ◽  
Author(s):  
Chung-Ping Chang ◽  
Pi-Cheng Tung ◽  
Lih-Horng Shyu ◽  
Yung-Cheng Wang ◽  
Eberhard Manske
Keyword(s):  
Displacement Measurement ◽  
Measuring Range ◽  
Fabry Perot

scholarly journals Investigation on the Differential Quadrature Fabry–Pérot Interferometer with Variable Measurement Mirrors

2020 ◽  
Vol 10 (18) ◽  
pp. 6191
Author(s):  
Yi-Chieh Shih ◽  
Pi-Cheng Tung ◽  
Wen-Yuh Jywe ◽  
Chung-Ping Chang ◽  
Lih-Horng Shyu ◽  
...  
Keyword(s):  
Measurement Procedure ◽  
Differential Quadrature ◽  
Displacement Measurement ◽  
Nonlinearity Error ◽  
Signal Distribution ◽  
Dc Offset ◽  
Common Path ◽  
Fabry Perot ◽  
Path Structure ◽  
First Time

Due to the common path structure being insensitive to the environmental disturbances, relevant Fabry–Pérot interferometers have been presented for displacement measurement. However, the discontinuous signal distribution exists in the conventional Fabry–Pérot interferometer. Although a polarized Fabry–Pérot interferometer with low finesse was subsequently proposed, the signal processing is complicated, and the nonlinearity error of sub-micrometer order occurs in this signal. Therefore, a differential quadrature Fabry–Pérot interferometer has been proposed for the first time. In this measurement system, the nonlinearity error can be improved effectively, and the DC offset during the measurement procedure can be eliminated. Furthermore, the proposed system also features rapid and convenient replacing the measurement mirrors to meet the inspection requirement in various measuring ranges. In the comparison result between the commercial and self-developed Fabry–Pérot interferometer, it reveals that the maximum standard deviation is less than 0.120 μm in the whole measuring range of 600 mm. According to these results, the developed differential Fabry–Pérot interferometer is feasible for precise displacement measurement.

Fabry–Perot interference-based fiber-optic sensor for small displacement measurement

2010 ◽  
Vol 283 (17) ◽  
pp. 3315-3319 ◽  
Author(s):  
Ji-Huan Chen ◽  
Xu-Guang Huang ◽  
Jia-Rong Zhao ◽  
Jin Tao ◽  
Wei-Xin He ◽  
...  
Keyword(s):  
Fiber Optic ◽  
Displacement Measurement ◽  
Fiber Optic Sensor ◽  
Small Displacement ◽  
Optic Sensor ◽  
Fabry Perot

scholarly journals Microdisplacement Measurement Based on F-P Etalon: Processing Method and Experiments

Sensors ◽  
2021 ◽  
Vol 21 (11) ◽  
pp. 3749
Author(s):  
Xiaoyan Shen ◽  
Shinan Zhou ◽  
Dongsheng Li
Keyword(s):  
Data Processing ◽  
Processing Method ◽  
Displacement Measurement ◽  
Concentric Ring ◽  
Data Processing Method ◽  
Circle Centre ◽  
Fabry Perot ◽  
Coordinate Rotation ◽  
Circular Regression ◽  
Extended Uncertainty

Herein, a processing method is proposed for accurate microdisplacement measurements from a 2D Fabry–Perot (F-P) fringe pattern. The core of the processing algorithm uses the F-P interference imaging concentric ring pattern to accurately calculate the centre coordinates of the concentric ring. The influencing factors of measurement were analysed, and the basic idea of data processing was provided. In particular, the coordinate rotation by the 45-degree method (CR) was improved; consequently, the virtual pixel interval was reduced by half, and the calculation accuracy of the circle centre coordinate was improved. Experiments were conducted to analyse the influence of the subdivision and circle fitting methods. The results show that the proposed secondary coordinate rotation (SCR) by 45 degrees method can obtain higher accuracy of the centre coordinate than the CR method, and that the multichord averaging method (MCAM) is more suitable for calculation of the centre coordinate than the circular regression method (CRM). Displacement measurement experiments were performed. The results show that the standard experimental deviation of the centre of the circle is approximately 0.009 µm, and the extended uncertainty of the displacement measurement in the range of 5 mm is approximately 0.03 μm. The data processing method studied in this study can be widely used in the field of F-P interferometry.

scholarly journals Methode of phase correction of displacement measurement using Fabry-Perot interferometer in calculable capacitor

2016 ◽  
Vol 65 (11) ◽  
pp. 110601
Author(s):  
Wang Jian-Bo ◽  
Qian Jin ◽  
Liu Zhong-You ◽  
Lu Zu-Liang ◽  
Huang Lu ◽  
...  
Keyword(s):  
Phase Correction ◽  
Displacement Measurement ◽  
Fabry Perot

Compensation of Tilt Angles and Verification of Displacement Measurements with a Fabry-Perot Interferometer

2010 ◽  
Vol 437 ◽  
pp. 95-97 ◽  
Author(s):  
Yung Cheng Wang ◽  
Lih Horng Shyu ◽  
Wen Yuh Jywe ◽  
Bean Yin Lee
Keyword(s):  
Laser Interferometer ◽  
Control Mechanism ◽  
Experimental Tests ◽  
Measurement Range ◽  
Displacement Measurement ◽  
Measurement Systems ◽  
Fabry Perot ◽  
Large Measurement ◽  
Current Systems ◽  
Comparison Measurements

The construction of Fabry-Perot interferometer is very simple and it has been already utilized in different measurement systems. The result of displacement measurement is obviously influenced by the tilt angles of measurement mirror, if a Fabry-Perot interferometer is utilized for displacement measurement. Hence, the measuring range of current systems is rather small (less than 1 mm). The goal of this investigation is to develop a Fabry-Perot interferometer for large travelling range (till 60 mm) by aid of compensation of tilt angles with an angular sensor, piezo translators, control mechanism and self-designed software. To verify the measuring characteristic of the self-developed Fabry-Perot interferometer, some comparison measurements have been performed. A commercial laser interferometer serves as reference standard and the differences between Fabry-Perot interferometer and the commercial Laser interferometer are measured. Through experimental tests, the differences are less than 0.3 m in the full measurement range. The results show that the Fabry-Perot interferometer can meet the measuring requirement with high accuracy of sub-micrometer order and large measurement range.

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