scholarly journals Lateral error reduction in the 3D characterization of deep MOEMS devices using white light interference microscopy

2004 ◽  
Author(s):  
Paul C. Montgomery ◽  
Denis Montaner ◽  
Omar Manzardo ◽  
Hans-Peter Herzig
Keyword(s):  
White Light ◽  
Error Reduction ◽  
Interference Microscopy ◽  
Light Interference ◽  
White Light Interference ◽  
Lateral Error

scholarly journals Wide-field parallel mapping of local spectral and topographic information with white light interference microscopy

2021 ◽  
Author(s):  
Sébastien MARBACH ◽  
Rémy Claveau ◽  
Fangting WANG ◽  
Jesse SCHIFFLER ◽  
Paul Montgomery ◽  
...  
Keyword(s):  
White Light ◽  
Interference Microscopy ◽  
Wide Field ◽  
Light Interference ◽  
Topographic Information ◽  
Field Parallel ◽  
White Light Interference

scholarly journals Gap-matching algorithm with the impCEEMDAN in scanning white-light interference microscopy

2020 ◽  
Vol 28 (10) ◽  
pp. 15101
Author(s):  
Mei Sang ◽  
Xiangyu Du ◽  
Shuang Wang ◽  
Tianhua Xu ◽  
Jie Dong ◽  
...  
Keyword(s):  
White Light ◽  
Interference Microscopy ◽  
Matching Algorithm ◽  
Light Interference ◽  
White Light Interference

Ultrahigh-resolution OCT using white-light interference microscopy

2003 ◽  
Author(s):  
Arnaud Dubois ◽  
Laurent Vabre ◽  
Romain Lecaque ◽  
Albert-Claude Boccara
Keyword(s):  
White Light ◽  
Interference Microscopy ◽  
Ultrahigh Resolution ◽  
Light Interference ◽  
White Light Interference
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