Studies of the properties of the temporal phase-shifting method applied to silicone microelement vibration investigations using the time-average method

Author(s):  
Krzysztof Patorski ◽  
Zbigniew Sienicki ◽  
Michal Pawlowski ◽  
Adam R. Styk ◽  
Agata Jzwicka
2013 ◽  
Vol 534 ◽  
pp. 149-153 ◽  
Author(s):  
Yoshitaka Takahashi ◽  
Kazuki Morishima ◽  
Masayuki Yokota

In recent years optical disks have been very popular and in manufacturing process error detection in optical disks becomes very important, especially for the defects whose size of a few millimeters in length and several hundred nanometers in depth. The authors have developed a new system to measure the defects of disk substrates using a Mach-Zehnder interferometer with a phase shifting method. But it was found that optical disks had undulation of the optical thickness and it disturbed the detection of defects. To solve the problem moving-average method was developed and introduced in data processing to distinguish the defect from the undulation, and with modified unwrapping program the defect was visualized by binary image processing.


2013 ◽  
Vol 52 (4) ◽  
pp. 040501 ◽  
Author(s):  
Xusheng Zhang ◽  
Chuan He ◽  
Haoyu Wang

1999 ◽  
Vol 38 (28) ◽  
pp. 5931 ◽  
Author(s):  
Anand Asundi ◽  
Liu Tong ◽  
Chai Gin Boay

2012 ◽  
Vol 6-7 ◽  
pp. 76-81
Author(s):  
Yong Liu ◽  
Ding Fa Huang ◽  
Yong Jiang

Phase-shifting interferometry on structured light projection is widely used in 3-D surface measurement. An investigation shows that least-squares fitting can significantly decrease random error by incorporating data from the intermediate phase values, but it cannot completely eliminate nonlinear error. This paper proposes an error-reduction method based on double three-step phase-shifting algorithm and least-squares fitting, and applies it on the temporal phase unwrapping algorithm using three-frequency heterodyne principle. Theoretical analyses and experiment results show that this method can greatly save data acquisition time and improve the precision.


Measurement ◽  
2012 ◽  
Vol 45 (1) ◽  
pp. 101-108 ◽  
Author(s):  
Haihua Cui ◽  
Wenhe Liao ◽  
Ning Dai ◽  
Xiaosheng Cheng

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