The erosion of materials exposed to a laser-pulsed-plasma (LPP) extreme ultraviolet (EUV) illumination source

2004 ◽  
Author(s):  
Richard J. Anderson ◽  
Dean A. Buchenauer ◽  
Leonard E. Klebanoff ◽  
Obert R. Wood II ◽  
Nora V. Edwards
Keyword(s):  
Extreme Ultraviolet ◽  
Pulsed Plasma ◽  
Illumination Source

Plasma-based sources of extreme ultraviolet radiation for lithography and mask inspection

2018 ◽  
Vol 189 (03) ◽  
pp. 323-334 ◽  
Author(s):  
D.B. Abramenko ◽  
P.S. Antsiferov ◽  
D.I. Astakhov ◽  
Aleksandr Yu. Vinokhodov ◽  
Il'ya Yu. Vichev ◽  
...  
Keyword(s):  
Ultraviolet Radiation ◽  
Extreme Ultraviolet ◽  
Mask Inspection ◽  
Extreme Ultraviolet Radiation

Equipment for Subpicosecond Extreme Ultraviolet Facility.

1986 ◽  
Author(s):  
Charles K. Rhodes ◽  
Keith Boyer ◽  
Tsing Shan Luk
Keyword(s):  
Extreme Ultraviolet
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