157-nm pellicles for photolithography: mechanistic investigation of the deep-UV photolysis of fluorocarbons
2011 ◽
Vol 133
(43)
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pp. 17257-17261
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2012 ◽
Vol 18
(6)
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pp. 1820-1825
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2020 ◽
Vol 140
(7)
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pp. 152-157
2020 ◽
2017 ◽
2019 ◽
2019 ◽
Vol 75
(7)
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pp. III_91-III_96
2019 ◽
Vol 512
◽
pp. 213-218
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