3-D surface profile measurement by 2-D heterodyne low-coherence interferometer

2003 ◽  
Author(s):  
Hirokazu Matsumoto ◽  
Akiko Hirai
Keyword(s):  
Surface Profile ◽  
Profile Measurement ◽  
Low Coherence ◽  
Surface Profile Measurement

Surface profile measurement of doped silicon using near-infrared low-coherence light

2019 ◽  
Vol 58 (27) ◽  
pp. 7436 ◽  
Author(s):  
Xinyu Yan ◽  
Jie Cheng ◽  
Dian Bian ◽  
Yang Lu ◽  
Liandong Yu
Keyword(s):  
Near Infrared ◽  
Surface Profile ◽  
Profile Measurement ◽  
Low Coherence ◽  
Doped Silicon ◽  
Surface Profile Measurement

scholarly journals In-situ fiber-based surface profile measurement system using low coherence interferometer

2018 ◽  
Author(s):  
Jon Petzing ◽  
Shreedhar Rangappa ◽  
Peter Kinnell ◽  
Ranveer S. Matharu ◽  
Tom Hovell ◽  
...  
Keyword(s):  
Measurement System ◽  
Surface Profile ◽  
Profile Measurement ◽  
Low Coherence ◽  
Surface Profile Measurement

Surface Profile Measurement of Parallel Plates Based on Low-Coherence Light Interference

2012 ◽  
Vol 49 (12) ◽  
pp. 122201
Author(s):  
王军 Wang Jun ◽  
陈磊 Chen Lei ◽  
吴泉英 Wu Quanying ◽  
臧涛成 Zang Taocheng
Keyword(s):  
Surface Profile ◽  
Profile Measurement ◽  
Parallel Plates ◽  
Low Coherence ◽  
Light Interference ◽  
Surface Profile Measurement
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