Novel method of fabricating Fabry-Perot cavity employing MEMS wet-etching process

2004 ◽  
Author(s):  
Min Xiang ◽  
Yanmin Cai ◽  
Yaming Wu ◽  
Jianyi Yang ◽  
Yuelin Wang
Keyword(s):  
Wet Etching ◽  
Etching Process ◽  
Fabry Perot ◽  
Novel Method

Fabrication and analysis of a Fabry-Perot cavity with a micromechanical wet-etching process

2004 ◽  
Vol 43 (16) ◽  
pp. 3258 ◽  
Author(s):  
Min Xiang ◽  
Yan Min Cai ◽  
Ya Ming Wu ◽  
Jian Yi Yang ◽  
Yue Lin Wang
Keyword(s):  
Wet Etching ◽  
Etching Process ◽  
Fabry Perot

Photosensitive terpolymer for all-wet-etching process: Material characterization and device fabrication

2010 ◽  
Vol 518 (8) ◽  
pp. 2147-2151
Author(s):  
Abderrafia Moujoud ◽  
Sungho Kang ◽  
Hyun Jae Kim ◽  
Mark Andrews
Keyword(s):  
Material Characterization ◽  
Device Fabrication ◽  
Wet Etching ◽  
Etching Process ◽  
Process Material

LiTaO3 Recording Media Prepared by Polarization Controlled Wet Etching Process

2004 ◽  
Vol 68 (1) ◽  
pp. 221-228
Author(s):  
YOSHIOMI HIRANAGA ◽  
YASUO WAGATSUMA ◽  
YASUO CHO
Keyword(s):  
Wet Etching ◽  
Etching Process ◽  
Recording Media

Characteristics on the Gate Insulator of Metal Tip Field Emitter Arrays after Wet Etching Process

1997 ◽  
Vol 36 (Part 1, No. 6A) ◽  
pp. 3576-3579
Author(s):  
Yu Ho Jung ◽  
Byeong Kwon Ju ◽  
Jae Hoon Jung ◽  
Yun Hi Lee ◽  
Myung Hwan Oh ◽  
...  
Keyword(s):  
Wet Etching ◽  
Etching Process ◽  
Gate Insulator ◽  
Field Emitter ◽  
Field Emitter Arrays ◽  
Metal Tip

Study of Oxygen Concentration in TMAH Solution for Improvement of Sigma-Shaped Wet Etching Process

2016 ◽  
Vol 255 ◽  
pp. 18-21
Author(s):  
Yong Gen He ◽  
Huan Xin Liu ◽  
Jia Lei Liu ◽  
Jin Gang Wu ◽  
Christian Haigermoser ◽  
...  
Keyword(s):  
Oxygen Concentration ◽  
Wet Etching ◽  
Tetramethylammonium Hydroxide ◽  
Etching Process ◽  
Shape Formation ◽  
Ic Manufacturing ◽  
The Impact ◽  
Tmah Solution

Tetramethylammonium hydroxide (TMAH) is a common etchant for Sigma shape formation in IC manufacturing. The impact of oxygen dissolved in TMAH solution on process was studied in this paper. A novel O2 gas injector was developed to improve the process stabilization by control of the oxygen concentration in TMAH solution

Micro-fabrication techniques applied to aluminosilicate glass surfaces: Micro-indentation and wet etching process

2009 ◽  
Vol 517 (9) ◽  
pp. 2900-2904 ◽  
Author(s):  
Yasuhiro Saito ◽  
Shinya Okamoto ◽  
Hiroyuki Inomata ◽  
Junji Kurachi ◽  
Takeshi Hidaka ◽  
...  
Keyword(s):  
Wet Etching ◽  
Etching Process ◽  
Aluminosilicate Glass ◽  
Micro Fabrication ◽  
Glass Surfaces ◽  
Micro Indentation
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