Silicon waveguides fabrication process based on the anisotropic etching of Si<111>-oriented wafers

2003 ◽  
Author(s):  
Dana Cristea ◽  
Paula Obreja ◽  
Elena Manea ◽  
M. Kusko
Keyword(s):  
Anisotropic Etching ◽  
Fabrication Process ◽  
Silicon Waveguides

A GENERAL ANISOTROPIC ETCHING STRATEGY FOR THE FABRICATION OF TUBE-LIKE OR MESOPOROUS SINGLE CRYSTAL TiO2

2013 ◽  
Vol 06 (06) ◽  
pp. 1350051
Author(s):  
YUN WEI ◽  
HAO PAN ◽  
JIESHU QIAN ◽  
XINGFU ZHOU
Keyword(s):  
Single Crystal ◽  
Vital Role ◽  
Anisotropic Etching ◽  
Fabrication Process ◽  
Single Crystalline ◽  
Facile Fabrication

A general anisotropic etching strategy is proposed here for the synthesis of four types of novel TiO 2 materials with versatile tube-like and single-crystalline mesoporous micro-nanostructures. All the tube-like TiO 2 materials have V-shaped inner structure and the mesoporous products have high single-crystallinity. In the fabrication process, etching agents and titanium sources play vital role in determining the morphology of the TiO 2 products. This opens a door toward facile fabrication of tube-like or single-crystalline mesoporous nanomaterials via anisotropic etching route.

Linewidth measurement using the low voltage SEM

1986 ◽  
Vol 44 ◽  
pp. 652-653
Author(s):  
M.G. Rosenfield
Keyword(s):  
Electron Microscope ◽  
Scanning Electron Microscope ◽  
Integrated Circuits ◽  
Secondary Electron ◽  
Low Voltage ◽  
Fabrication Process ◽  
Critical Dimensions ◽  
Linewidth Measurement ◽  
Threshold Technique ◽  
Scanning Electron

Minimum feature sizes in experimental integrated circuits are approaching 0.5 μm and below. During the fabrication process it is usually necessary to be able to non-destructively measure the critical dimensions in resist and after the various process steps. This can be accomplished using the low voltage SEM. Submicron linewidth measurement is typically done by manually measuring the SEM micrographs. Since it is desirable to make as many measurements as possible in the shortest period of time, it is important that this technique be automated.Linewidth measurement using the scanning electron microscope is not well understood. The basic intent is to measure the size of a structure from the secondary electron signal generated by that structure. Thus, it is important to understand how the actual dimension of the line being measured relates to the secondary electron signal. Since different features generate different signals, the same method of relating linewidth to signal cannot be used. For example, the peak to peak method may be used to accurately measure the linewidth of an isolated resist line; but, a threshold technique may be required for an isolated space in resist.

INTEGRATED FABRICATION PROCESS FOR SOLID OXIDE FUELCELLS USING HYBRID PLASMA SPRAYING

1997 ◽  
Vol 1 (1) ◽  
pp. 41-47 ◽  
Author(s):  
Noriyuki Nomoto ◽  
Yoshitomi Okazaki ◽  
Kenji Kuroda ◽  
Shunji Takenoiri ◽  
Toyonobu Yoshida
Keyword(s):  
Plasma Spraying ◽  
Solid Oxide ◽  
Fabrication Process ◽  
Hybrid Plasma

scholarly journals Economical rapid-prototyping of aspherical lenses

2019 ◽  
Vol 215 ◽  
pp. 04001 ◽  
Author(s):  
Angelina Müller ◽  
Matthias C. Wapler ◽  
Ulrike Wallrabe
Keyword(s):  
Thermal Expansion ◽  
Rapid Prototyping ◽  
Shape Optimization ◽  
Surface Deformation ◽  
Fabrication Process ◽  
Aspherical Lens ◽  
Laser Structuring ◽  
Aspherical Lenses ◽  
Design Freedom ◽  
Micro Lens

We present a rapid-prototyping process to fabricate aspherical lens arrays based on surface deformation due to thermal expansion of PDMS. Using laser-structuring and molding in combination with an FEM-based shape optimization, we were able to design, fabricate and characterize different micro-lens arrays. This fabrication process can be used for almost any kind of arbitrary lens shape, which allows for a large design freedom for micro lenses.

Effect of low vacuum environment on the fused filament fabrication process

2021 ◽  
Author(s):  
Marshall Quinn ◽  
Ugo Lafont ◽  
Johan Versteegh ◽  
Jian Guo
Keyword(s):  
Fabrication Process ◽  
Fused Filament Fabrication
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