Common-path and phase-shift interferometer for length measurement

2004 ◽  
Author(s):  
Xudong Han ◽  
Hua Ai ◽  
Changyuan Han
2014 ◽  
Vol 53 (10) ◽  
pp. 2067 ◽  
Author(s):  
Zhi Zhong ◽  
Bengong Hao ◽  
Mingguang Shan ◽  
Ying Wang ◽  
Ming Diao ◽  
...  

2016 ◽  
Vol 45 (7) ◽  
pp. 70706004
Author(s):  
朱兴邦 ZHU Xing-bang ◽  
孙权社 SUN Quan-she ◽  
郑祥亮 ZHENG Xiang-liang ◽  
韩忠 HAN Zhong ◽  
刘志明 LIU Zhi-ming

2019 ◽  
Vol 58 (3) ◽  
pp. 593 ◽  
Author(s):  
Shengjia Wang ◽  
Jie Dong ◽  
Franziska Pöller ◽  
Xingchen Dong ◽  
Min Lu ◽  
...  

2019 ◽  
Vol 90 (10) ◽  
pp. 105105 ◽  
Author(s):  
Helia Hooshmand-Ziafi ◽  
Masoomeh Dashtdar ◽  
Khosrow Hassani ◽  
Morvarid Motallebi-Araghi

2011 ◽  
Vol 5 (2) ◽  
pp. 162-166 ◽  
Author(s):  
Ryohei Hanayama ◽  
◽  
Katsuhiro Ishii

In discussing small-lens surface shape measurement, a shearing interferometer with a plane-parallel glass plate is used to shape a laterally sheared beam from an induced test beam, producing interferogramreflecting wavefront phase distribution. This approach is robust against disturbance thanks to common-path interferometry and to the single solid glass plate. The Degree Of Freedom (DOF) for the shape of targets is high because no reference surfaces are needed. These make our proposal practical for use in the actual factory environment. The phase shift we use to analyze the interference fringe is induced by tilting a shear plate in this configuration, which is far cheaper than conventional equipment using PZT actuators. Our interferometer’s phase distribution shows a differential image of the target wavefront, so detected phase distribution must be integrated to get the original surface shape, as confirmed in the sections that follow.


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