High-power laser-produced plasma source for nanolithography

2004 ◽  
Author(s):  
Richard A. Forber ◽  
Celestino J. Gaeta ◽  
Harry Rieger ◽  
Heinz Siegert ◽  
Scott McLeod ◽  
...  
Keyword(s):  
High Power ◽  
Plasma Source ◽  
High Power Laser ◽  
Power Laser ◽  
Laser Produced Plasma

Low-debris plasma source produced by high-power laser

1998 ◽  
Author(s):  
Jinquang Lin ◽  
Xiaowei Song ◽  
Bo Chen ◽  
Jianlin Cao
Keyword(s):  
High Power ◽  
Plasma Source ◽  
High Power Laser ◽  
Power Laser

Picosecond High Power Laser Systems And Picosecond Diagnostic Technique In Laser Produced Plasma

1979 ◽  
Author(s):  
Hiroto Kitroda ◽  
Hrutake Masuko ◽  
Shigeru Maekawa ◽  
Yoshiji Suzuki ◽  
Masaru Sugiyama ◽  
...  
Keyword(s):  
High Power ◽  
Diagnostic Technique ◽  
High Power Laser ◽  
Power Laser ◽  
Laser Produced Plasma ◽  
Laser Systems

Evolution of fs high-power laser-produced plasma

1996 ◽  
Author(s):  
K. Shimizu ◽  
M. Kuwabara ◽  
K. Go ◽  
H. Takakuwa ◽  
H. Kitazawa ◽  
...  
Keyword(s):  
High Power ◽  
High Power Laser ◽  
Power Laser ◽  
Laser Produced Plasma

High-power laser-produced-plasma EUV source

2002 ◽  
Author(s):  
William P. Ballard ◽  
Luis J. Bernardez II ◽  
Robert E. Lafon ◽  
Richard J. M. Anderson ◽  
Yon E. Perras ◽  
...  
Keyword(s):  
High Power ◽  
High Power Laser ◽  
Power Laser ◽  
Laser Produced Plasma

X-ray Spectral Measurements of the JMAR High-Power Laser-plasma Source

2002 ◽  
Author(s):  
Robert R. Whitlock ◽  
Charles M. Dozier ◽  
Daniel A. Newman ◽  
I. C. Edmond Turcu ◽  
Celestino J. Gaeta ◽  
...  
Keyword(s):  
High Power ◽  
Laser Plasma ◽  
Plasma Source ◽  
Spectral Measurements ◽  
High Power Laser ◽  
Power Laser ◽  
X Ray

A high-power laser plasma source

1972 ◽  
Vol 16 (5) ◽  
pp. 695-697 ◽  
Author(s):  
V. A. Batanov ◽  
V. K. Goncharov ◽  
L. Ya. Min'ko
Keyword(s):  
High Power ◽  
Laser Plasma ◽  
Plasma Source ◽  
High Power Laser ◽  
Power Laser

scholarly journals High Power Laser Laboratory at the Institute of Plasma Physics and Laser Microfusion: equipment and preliminary research

Nukleonika ◽  
2015 ◽  
Vol 60 (2) ◽  
pp. 245-248 ◽  
Author(s):  
Agnieszka Zaraś-Szydłowska ◽  
Jan Badziak ◽  
Marcin Rosiński ◽  
Józef Makowski ◽  
Piotr Parys ◽  
...  
Keyword(s):  
Plasma Physics ◽  
High Power ◽  
High Power Laser ◽  
Power Laser ◽  
X Ray ◽  
Preliminary Results ◽  
Diagnostic Instruments ◽  
Laser Produced Plasma ◽  
Preliminary Research

Abstract The purpose of this paper is to present the newly-opened High Power Laser Laboratory (HPLL) at the Institute of Plasma Physics and Laser Microfusion (IPPLM). This article describes the laser, the main laboratory accessories and the diagnostic instruments. We also present preliminary results of the first experiment on ion and X-ray generation from laser-produced plasma that has been already performed at the HPLL.

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