Polycrystalline SiGe technology for uncooled microbolometer arrays

Mapping Intimacies ◽

10.1117/12.505836 ◽

2003 ◽

Cited By ~ 1

Author(s):

Vladimir N. Leonov ◽

Claus Goessens ◽

Chris Van Hoof ◽

Bob Grietens ◽

Natalia A. Perova ◽

...

Keyword(s):

Uncooled Microbolometer

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Uncooled microbolometer mosaic focal plane arrays for the infrared and terahertz ranges

Optoelectronics Instrumentation and Data Processing ◽

10.3103/s875669901602014x ◽

2016 ◽

Vol 52 (2) ◽

pp. 203-209

Author(s):

M. A. Dem’yanenko ◽

A. I. Kozlov ◽

A. R. Novoselov ◽

V. N. Ovsyuk

Keyword(s):

Focal Plane ◽

Focal Plane Arrays ◽

Uncooled Microbolometer

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High resolution images obtained with uncooled microbolometer

10.1117/12.782783 ◽

2008 ◽

Author(s):

J. Sadi ◽

A. Crastes

Keyword(s):

High Resolution ◽

Uncooled Microbolometer ◽

High Resolution Images

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Stress Hysteresis and Thermal-Mechanical Behavior of PECVD Silicon Nitride and Ebeam Aluminum Films for Microbolometer Applications

MRS Proceedings ◽

10.1557/proc-854-u10.11 ◽

2004 ◽

Vol 854 ◽

Author(s):

Shusen Huang ◽

Xin Zhang

Keyword(s):

Silicon Nitride ◽

Mechanical Behavior ◽

Measurement System ◽

Low Cost ◽

High Sensitivity ◽

Central Idea ◽

Aluminum Films ◽

Uncooled Microbolometer ◽

Curvature Measurement ◽

Stress Hysteresis

ABSTRACTUncooled cantilever-based microbolometer arrays received more attention recently due to high sensitivity and low cost. The central idea is built on the deflection of a bilayer SiNx/Al material upon the temperature change. The thermal-mechanical behavior of the bilayer is significant for the performance of the microbolometers. In this paper, we perform thermal cyclings to aluminum and SiNx films. The CTEs and the stress evolutions were measured using a curvature measurement system. The curvature profile of a SiNx/Al/Si component was predicted using an extension of Stoney's formula, well agreeing with the experimental results. This work demonstrates fundamental mechanics issues in bilayer SiNx/Al components, which have a great potential for the use in uncooled microbolometer applications.

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