New method decreasing drive voltage of torsion beam actuator micromechanical optical switches
2011 ◽
Vol 228-229
◽
pp. 1075-1079
◽
Keyword(s):
1968 ◽
Vol 26
◽
pp. 98-99
Keyword(s):
1997 ◽
Vol 103
(1)
◽
pp. 219
2008 ◽
Vol 2008
◽
pp. 19-21
Keyword(s):
Keyword(s):
2008 ◽
Vol 2008
◽
pp. 55-56