Contamination rates of optical surfaces at 157 nm: impurities outgassed from construction materials and from photoresists

2003 ◽  
Author(s):  
Theodore M. Bloomstein ◽  
Jan H. C. Sedlacek ◽  
Stephen T. Palmacci ◽  
Dennis E. Hardy ◽  
Vladimir Liberman ◽  
...  
Keyword(s):  
Construction Materials ◽  
Optical Surfaces

scholarly journals EUV-Induced Plasma: A Peculiar Phenomenon of a Modern Lithographic Technology

2019 ◽  
Vol 9 (14) ◽  
pp. 2827 ◽  
Author(s):  
Beckers ◽  
Ven ◽  
Horst ◽  
Astakhov ◽  
Banine
Keyword(s):  
Rarefied Gas ◽  
Extreme Ultraviolet ◽  
Construction Materials ◽  
Optical Surfaces ◽  
Major Interest ◽  
Current Article ◽  
Plasma Characteristics ◽  
Euv Spectrum ◽  
Distinguishing Features ◽  
Peculiar Phenomenon

After a long period of relatively low interest, science related to effects in the Extreme Ultraviolet (EUV) spectrum range experienced an explosive boom of publications in the last decades. A new application of EUV in lithography was the reason for such a growth. Naturally, an intensive development in such area produces a snowball effect of relatively uncharted phenomena. EUV-induced plasma is one of those. While being produced in the volume of a rarefied gas, it has a direct impact onto optical surfaces and construction materials of lithography machines, and thus has not only scientific peculiarity, but it is also of major interest for the technological application. The current article provides an overview of the existing knowledge regarding EUV-induced plasma characteristics. It describes common, as well as distinguishing, features of it in comparison with other plasmas and discusses its interaction with solid materials. This article will also identify the gaps in the existing knowledge and it will propose ways to bridge them.

Corrosion monitoring and root cause identification in high solids concentrators

TAPPI Journal ◽  
2016 ◽  
Vol 15 (7) ◽  
pp. 467-477
Author(s):  
PASI NIEMELAINEN ◽  
MARTTI PULLIAINEN ◽  
JARMO KAHALA ◽  
SAMPO LUUKKAINEN
Keyword(s):  
Paper Industry ◽  
Black Liquor ◽  
Construction Materials ◽  
Open Circuit ◽  
Process Conditions ◽  
Potential Range ◽  
Corrosion Monitoring ◽  
General Corrosion ◽  
High Solids ◽  
Passive Area

Black liquor high solids (about 80%) concentrators have often been found to suffer from aggressive corrosion. In particular, the first and second effect bodies are susceptible to corrosion attacks resulting in tube leaks and wall thinning, which limit the availability and lifetime of evaporator lines. Corrosion dynamics and construction materials have been studied extensively within the pulp and paper industry to understand the corrosion process. However, it has been challenging to identify root causes for corrosion, which has limited proactive measures to minimize corrosion damage. Corrosion of the first phase concentrator was studied by defining the potential regions for passive area, stress corrosion cracking, pitting corrosion, and general corrosion. This was achieved by using a technique called polarization scan that reveals ranges for the passive area in which the equipment is naturally protected against corrosion. The open circuit potential, also known as corrosion potential, and linear polarization resistance of the metal were monitored online, which allowed for definition of corrosion risks for stainless steel 304L and duplex stainless steels 2205 and SAF 2906. An online temperature measurement added insight to the analysis. A process diagnostics tool was used to identify root causes of the corrosion attacks. Many of the root causes were related to process conditions triggering corrosion. Once the metal surface was activated, it was difficult to repassivate the metal naturally unless a sufficient potential range was reached.

Housing Inflation: Policy Guidelines from Shariah Perspective

2019 ◽  
Vol 16 (1) ◽  
pp. 70-81
Author(s):  
Azrul Azlan Iskandar Mirza ◽  
Asmaddy Haris ◽  
Ainulashikin Marzuki ◽  
Ummi Salwa Ahmad Bustamam ◽  
Hamdi Hakiem Mudasir ◽  
...  
Keyword(s):  
Content Analysis ◽  
Housing Prices ◽  
Construction Materials ◽  
Housing Price ◽  
Developed Countries ◽  
Control Element ◽  
Recent Issue ◽  
Analysis Methodology ◽  
The Government ◽  
Developing And Developed Countries

The soaring housing prices in Malaysia is not a recent issue. It is a global phenomenon especially in developing and developed countries, driven by factors including land price, location, construction materials cost, demand, and speculation. This issue demands immediate attention as it affects the younger generation, most of whom could not afford to buy their own house. The government has taken many initiatives and introduced regulations to ensure that housing prices are within the affordable range. This article aims to introduce a housing price control element from the Shariah perspective, as an alternative solution for all parties involved in this issue. It adopts content analysis methodology on policy from Shariah approved sources.

CREDO RADON UA – INFORMATION MODEL FOR CALCULATION OF ROAD CONSTRACTION

2019 ◽  
pp. 34-42
Author(s):  
Volodymyr Karedin ◽  
Nadiya Pavlenko
Keyword(s):  
Design Process ◽  
Static Loading ◽  
Computer Aided Design ◽  
Experimental Studies ◽  
Construction Materials ◽  
Residual Deformation ◽  
Road Construction ◽  
Information Support ◽  
Existing Structures ◽  
Road Pavement

CREDO RADON UA software provides an automated calculation of the strength of the pavement structures of non-rigid and rigid types, as well as the calculation of the strengthening of existing structures. In the article, one can see the main features and functionality of the CREDO RADON UA software, the main points in the calculations according to the new regulations. Information support of the design process includes necessary databases, informational and helping materials that make up the full support of the pavement design process. The concept of CREDO RADON UA 1.0 software is made on the use of elasticity theory methods in calculations of initial information models of pavements. Performing optimization calculations, the roadwear in CREDO RADON UA is designed in such a way that no unacceptable residual deformation occurs under the influence of short-term dynamic or static loading in the working layer of the earth bed and in the structural layers during the lifetime of the structure. The calculation algorithms were made in accordance with the current regulatory documents of Ukraine. CREDO RADON UA software allows user to create information bases on road construction materials and vehicles as part of the traffic flow for calculations. The presented system of automated modeling makes it easier for the customer to control the quality of design solutions, to reasonably assign designs to layers of reinforcement, to quickly make comparisons of calculations of different designs for the optimal use of allocated funds. Prospects for further improvement of the program should be the results of theoretical and experimental studies on filling the databases, which are used as information support for automated design of road structures. Keywords: CREDO RADON UA, road, computer-aided design, repair project, road pavement, strengthening, construction, rigid pavement, elasticity module, a transport stream, calculation method, information support, dynamic or static loading.

Distribution and effects of organic contaminants on optical surfaces - Modeling

1998 ◽  
Author(s):  
Robert Long, Jr. ◽  
Fred Rigby ◽  
Lawrence Grimes
Keyword(s):  
Organic Contaminants ◽  
Optical Surfaces
Sign in / Sign up

Export Citation Format

Share Document