Post soft-bake delay effect on CD variation in DUV resist

2003 ◽  
Author(s):  
Shu-Fen Tsai ◽  
Chih-You Chen ◽  
King-Terk Chan ◽  
Hann-Yii Gao ◽  
Chin-Yu Ku
Keyword(s):  
Delay Effect ◽  
Soft Bake

scholarly journals Time delay effect in a three coupled oscillator system of the physarum plasmodium

2000 ◽  
Vol 40 (supplement) ◽  
pp. S100
Author(s):  
A. Takamatsu ◽  
T. Fujii ◽  
I. Endo
Keyword(s):  
Time Delay ◽  
Delay Effect ◽  
Coupled Oscillator ◽  
Oscillator System ◽  
Time Delay Effect

Structural Control Considering Time Delay Effect

1985 ◽  
Vol 9 (4) ◽  
pp. 224-227 ◽  
Author(s):  
Mohamed Abdel-Rohman
Keyword(s):  
Time Delay ◽  
Active Control ◽  
Theoretical Consideration ◽  
Structural Control ◽  
Control Mechanism ◽  
Structural Response ◽  
Delay Effect ◽  
Numerical Example ◽  
Control Forces ◽  
Time Delay Effect

The time delay between measuring the structural response, and applying the designed active control forces may affect the controlled response of the structure if not taken into consideration. In this paper it is shown how to design the control forces to compensate for the delay effect. It is also shown that the time delay effect can be used as a criterion to judge the effectiveness of the proposed control mechanism. As an illustration of the theoretical consideration, a numerical example in which a tall building is controlled by means of active tendons is presented.

scholarly journals Delay effect on phase transitions in traffic dynamics

1998 ◽  
Vol 57 (6) ◽  
pp. 6415-6421 ◽  
Author(s):  
Takashi Nagatani ◽  
Ken Nakanishi
Keyword(s):  
Phase Transitions ◽  
Delay Effect ◽  
Traffic Dynamics

Postexposure Delay Effect on Linewidth Variation in Base Added Chemically Amplified Resist

2000 ◽  
Vol 147 (10) ◽  
pp. 3833 ◽  
Author(s):  
Chin-Yu Ku ◽  
Jia-Min Shieh ◽  
Tsann-Bim Chiou ◽  
Hwang-Kuen Lin ◽  
Tan Fu Lei
Keyword(s):  
Delay Effect ◽  
Chemically Amplified ◽  
Chemically Amplified Resist
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