High-sensitivity chlorine gas sensors using metal-phthalocyanine thin films

2002 ◽  
Author(s):  
Toshihiro Miyata ◽  
Seiji Kawaguchi ◽  
Tadatsugu Minami
Keyword(s):  
Thin Films ◽  
Gas Sensors ◽  
High Sensitivity ◽  
Metal Phthalocyanine ◽  
Chlorine Gas

Chlorine gas sensors with high sensitivity using Mg-phthalocyanine thin films

2005 ◽  
Vol 244 (1-4) ◽  
pp. 563-567 ◽  
Author(s):  
Toshihiro Miyata ◽  
Tadatsugu Minami
Keyword(s):  
Thin Films ◽  
Gas Sensors ◽  
High Sensitivity ◽  
Chlorine Gas

High sensitivity chlorine gas sensors using Cu–phthalocyanine thin films

2003 ◽  
Vol 425 (1-2) ◽  
pp. 255-259 ◽  
Author(s):  
Toshihiro Miyata ◽  
Seiji Kawaguchi ◽  
Makoto Ishii ◽  
Tadastugu Minami
Keyword(s):  
Thin Films ◽  
Gas Sensors ◽  
High Sensitivity ◽  
Chlorine Gas

High sensitivity and selectivity chlorine gas sensors based on 3D open porous SnO2 synthesized by solid-state method

2019 ◽  
Vol 45 (16) ◽  
pp. 20566-20574 ◽  
Author(s):  
Weiming Zhang ◽  
Qiang Li ◽  
Chao Wang ◽  
Jiangwei Ma ◽  
Chao Wang ◽  
...  
Keyword(s):  
Solid State ◽  
Gas Sensors ◽  
High Sensitivity ◽  
Solid State Method ◽  
Chlorine Gas ◽  
Sensitivity And Selectivity ◽  
State Method

Ozone gas sensors with high sensitivity using Zn2In2O5–MgIn2O4 multicomponent oxide thin films

2000 ◽  
Vol 126 (2-3) ◽  
pp. 219-224 ◽  
Author(s):  
Toshihiro Miyata ◽  
Tomohiro Hikosaka ◽  
Tadatsugu Minami
Keyword(s):  
Thin Films ◽  
Gas Sensors ◽  
High Sensitivity ◽  
Oxide Thin Films ◽  
Multicomponent Oxide

Characterization and Ethanol Sensing Properties of Pt-Doped Sn-O-Te Thin Films

2010 ◽  
Vol 159 ◽  
pp. 133-136 ◽  
Author(s):  
Biliana Georgieva ◽  
Irena Podolesheva ◽  
Georgi Spasov
Keyword(s):  
Thin Films ◽  
Gas Sensors ◽  
High Sensitivity ◽  
Atomic Ratio ◽  
Volume Distribution ◽  
Nanocrystalline Films ◽  
Composition And Structure ◽  
Ethanol Vapours ◽  
Ethanol Sensing ◽  
Microscopy Techniques

Thin films (40-60 nm) prepared by co-evaporation of Sn and TeO2 were studied as ethanol gas sensors. In the as-deposited state, the films thus obtained are amorphous and consist of mixed Te and Sn oxides, doped with Te, Sn, and/or SnTe (depending on the atomic ratio between Sn and Te (RSn/Te)), due to interaction between the two substances during the co-deposition. After stepwise thermal treatment of films with RSn/Te ≈ 2.3 up to 360oC (by 40oC steps, for 15 minutes at each temperature) nanocrystalline films, built up of a mixture of SnO2, TeO2 and unstoichiometric Sn oxide were obtained. The Pt-doping was realized by thermal evaporation in a separate vacuum cycle, after the annealing. To study the film composition and structure as well as the volume distribution of the elements different electron microscopy techniques (TEM, SAED) and analytical methods (EDS in SEM, AES) were applied. The sensitivity towards ethanol vapours was investigated as a function of the substrate temperature (T) in the range from 20oC to 200oC. High sensitivity has been observed for Pt-doped films at T = 120oC. No cross sensitivity to relative humidity (RH [%]) was observed at this temperature. Further improvement of the sensitivity could be obtained by optimization of the thermal processing, Pt-doping and working temperature.

Catalyst free vapor–solid deposition of morphologically different β-Ga2O3 nanostructure thin films for selective CO gas sensors at low temperature

2016 ◽  
Vol 8 (15) ◽  
pp. 3224-3235 ◽  
Author(s):  
K. Girija ◽  
S. Thirumalairajan ◽  
Valmor R. Mastelaro ◽  
D. Mangalaraj
Keyword(s):  
Thin Films ◽  
Low Temperature ◽  
Gas Sensors ◽  
High Sensitivity ◽  
Catalyst Free ◽  
Unique Shape ◽  
Co Sensor ◽  
Co Gas ◽  
Solid Deposition

As prepared β-Ga2O3 thin films not only possess a unique shape but also influence the morphology dependent high sensitivity CO sensor at 100 °C.

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