Vapor deposition of amino-functionalized self-assembled monolayers on MEMS

Author(s):  
Matthew G. Hankins ◽  
Paul J. Resnick ◽  
Peggy J. Clews ◽  
Thomas M. Mayer ◽  
David R. Wheeler ◽  
...  
2010 ◽  
Vol 5 (2) ◽  
pp. 30-36 ◽  
Author(s):  
Laxman Kankate ◽  
Udo Werner ◽  
Andrey Turchanin ◽  
Armin Gölzhäuser ◽  
Helge Großmann ◽  
...  

2011 ◽  
Vol 7 (3) ◽  
pp. 1094-1103 ◽  
Author(s):  
Gaoshan Jing ◽  
Yu Wang ◽  
Tianyi Zhou ◽  
Susan F. Perry ◽  
Michael T. Grimes ◽  
...  

2020 ◽  
Vol 22 (2) ◽  
pp. 658-666
Author(s):  
Jason Miles ◽  
Yeongun Ko ◽  
Jan Genzer

We probe the structure of self-assembled monolayers comprising organosilanes on flat silica-based surfaces prepared by liquid and vapor deposition by removing the organosilane molecules gradually from the substrate via tetrabutylammonium fluoride.


2020 ◽  
Author(s):  
Bryan G. Salazar ◽  
Hanwen Liu ◽  
Amy V. Walker ◽  
Lisa McElwee-White

The reaction pathways of Pt CVD using (COD)PtMe<sub>2-x</sub>Cl<sub>x</sub> (x = 0, 1, 2) have been investigated on functionalized self-assembled monolayers (SAMs) as models for organic substrates. In the presence of 1,4-cyclohexadiene, a well-known alkyl radical trap, Pt deposition was increased by up to 10-fold creating a room-temperature effective Pt CVD process.<br><br>This article has been submitted to the Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films.


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