Zone-plate-array lithography (ZPL): a maskless fast-turn-around system for microoptic device fabrication
1990 ◽
Vol 29
(Part 2, No. 8)
◽
pp. L1539-L1541
◽
1998 ◽
Vol 16
(6)
◽
pp. 3426
◽
2004 ◽
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