Accuracy of simulation based on the acid-quencher mutual diffusion model in KrF processes

Author(s):  
Keiko T. Hattori ◽  
Jun Abe ◽  
Hiroshi Fukuda
2011 ◽  
Vol 22 (2-3) ◽  
pp. 251-259 ◽  
Author(s):  
Weixin Si ◽  
Zhiyong Yuan ◽  
Xiangyun Liao ◽  
Zhaoliang Duan ◽  
Yihua Ding ◽  
...  

2018 ◽  
Vol 14 (7) ◽  
pp. 3811-3824 ◽  
Author(s):  
Oriana De Vos ◽  
Richard M. Venable ◽  
Tanja Van Hecke ◽  
Gerhard Hummer ◽  
Richard W. Pastor ◽  
...  

2020 ◽  
Vol 13 (4) ◽  
pp. 1269-1278 ◽  
Author(s):  
Kyojin Ku ◽  
Byunghoon Kim ◽  
Sung-Kyun Jung ◽  
Yue Gong ◽  
Donggun Eum ◽  
...  

We propose a new lithium diffusion model involving coupled lithium and transition metal migration, peculiarly occurring in a lithium-rich layered oxide.


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