Spherical pinch x-ray generator prototype for microlithography

Analysis Of The Mechanism Of Soft X-ray Emission From A Spherical Pinch Radiation Source (spx II)

Proceedings of 1994 IEEE 21st International Conference on Plasma Sciences (ICOPS) ◽

10.1109/plasma.1994.588781 ◽

2005 ◽

Author(s):

J. Chen ◽

B. Hilko ◽

H. Chen ◽

E. Panarella

Keyword(s):

Radiation Source ◽

X Ray ◽

Spherical Pinch

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Progress report on the spherical pinch and the vacuum spark EUV/X-ray radiation sources

25th Anniversary, IEEE Conference Record - Abstracts. 1998 IEEE International Conference on Plasma Science (Cat. No.98CH36221) ◽

10.1109/plasma.1998.677905 ◽

2002 ◽

Author(s):

L. Zhang ◽

W. Tang ◽

K. Wirpszo ◽

E. Panarella

Keyword(s):

Progress Report ◽

X Ray ◽

Radiation Sources ◽

Spherical Pinch ◽

Vacuum Spark

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The Spherical Pinch As A Soft X-ray Source For microlithography And Other Industrial Applications

IEEE Conference Record - Abstracts. 1992 IEEE International Conference on Plasma ◽

10.1109/plasma.1992.697951 ◽

2005 ◽

Author(s):

S. Aithal ◽

M. Lamari ◽

E. Panarella

Keyword(s):

Industrial Applications ◽

X Ray ◽

Spherical Pinch

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Characteristics of the spherical pinch plasma radiation source (SPX II) for x-ray, UV, and deep-UV lithography

10.1117/12.146519 ◽

1993 ◽

Author(s):

Shridar Aithal ◽

Emilio Panarella ◽

M. Lamari ◽

B. Hilko ◽

Robert B. McIntosh

Keyword(s):

Radiation Source ◽

Plasma Radiation ◽

X Ray ◽

Pinch Plasma ◽

Uv Lithography ◽

Deep Uv ◽

Spherical Pinch

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Spherical pinch (soft x ray/EUV) and vacuum spark (soft x ray) for microlithography

10.1117/12.240479 ◽

1996 ◽

Author(s):

Liyan Zhang ◽

Emilio Panarella ◽

Mariusz Bielawski ◽

Haibo Chen

Keyword(s):

X Ray ◽

Spherical Pinch ◽

Vacuum Spark

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Spherical pinch x-ray generator (SPX II): prototype performance for x-ray lithography (Poster Paper)

10.1117/12.136028 ◽

1992 ◽

Cited By ~ 1

Author(s):

Shridar Aithal ◽

Kenji Kawai ◽

M. Lamari ◽

Emilio Panarella

Keyword(s):

X Ray ◽

Poster Paper ◽

Spherical Pinch

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X-Ray Emission from the Linear Plasma of a Spherical Pinch: The Electron Distribution Function in a Strong Electric Field

Fusion Technology ◽

10.13182/fst95-a30386 ◽

1995 ◽

Vol 27 (3) ◽

pp. 237-244

Author(s):

S. Manservisi ◽

V. G. Molinari ◽

A. Nespoli

Keyword(s):

Distribution Function ◽

Electric Field ◽

Electron Distribution ◽

Strong Electric Field ◽

Electron Distribution Function ◽

X Ray ◽

Spherical Pinch ◽

Linear Plasma

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Vacuum spark and spherical pinch x-ray/EUV point sources

10.1117/12.351113 ◽

1999 ◽

Cited By ~ 2

Author(s):

Frank F. Wu ◽

Wen-Chieh Tang ◽

Kazimierz W. Wirpszo ◽

Emilio Panarella

Keyword(s):

Point Sources ◽

X Ray ◽

Spherical Pinch ◽

Vacuum Spark

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Simulation analysis of the spherical pinch for neutron and hard X-ray generation in a 1 MJ experiment

International Conference on Plasma Sciences (ICOPS) ◽

10.1109/plasma.1993.593113 ◽

1993 ◽

Author(s):

H. Chen ◽

J. Chen ◽

B. Hilko ◽

M. Lamari ◽

D.P. Singh ◽

...

Keyword(s):

Simulation Analysis ◽

X Ray ◽

Spherical Pinch

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Theoretical analysis of soft x‐ray generation in the plasma of a spherical pinch

Journal of Applied Physics ◽

10.1063/1.336703 ◽

1986 ◽

Vol 59 (12) ◽

pp. 3990-3995 ◽

Cited By ~ 7

Author(s):

P. Savic ◽

E. Panarella

Keyword(s):

Theoretical Analysis ◽

X Ray ◽

Spherical Pinch

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