Optical surface analysis: a new technique for the inspection and metrology of optoelectronic films and wafers

Author(s):  
Laurie Bechtler ◽  
Vamsi Velidandla
1992 ◽  
Author(s):  
John A. Reffner ◽  
William T. Wihlborg ◽  
M. C. Sweeney

1998 ◽  
Vol 52 (8) ◽  
pp. 1111-1114 ◽  
Author(s):  
Yao Qun Li ◽  
Shin-Ya Sasaki ◽  
Takanori Inoue ◽  
Akira Harata ◽  
Teiichiro Ogawa

We have developed a CCD-based fiber-bundle confocal fluorescence microspectrometer exhibiting a spectrum of individual fiber spots on the CCD. The development led to a new technique, spatial imaging identification, and revealed the sources of various signals based on the spatial distribution of a signal in the spectral images. The new technique allows for easy alignment of the optics and discrimination of various interference lights. The potential application to surface analysis is also emphasized.


2005 ◽  
Vol 25 (1_suppl) ◽  
pp. S543-S543
Author(s):  
Satoshi Kimura ◽  
Keigo Matsumoto ◽  
Yoshio Imahori ◽  
Katsuyoshi Mineura ◽  
Toshiyuki Itoh

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