Three-dimensional microscopy through white light interferometry

2002 ◽  
Author(s):  
Blandine Laude ◽  
Antonello De Martino ◽  
Bernard Drevillon ◽  
L Benattar ◽  
Laurent Schwartz
Keyword(s):  
White Light ◽  
Three Dimensional ◽  
White Light Interferometry

Using White Light Interferometry for Mesoscale Part Inspection

2003 ◽  
Author(s):  
K. Meghan Shilling ◽  
Thomas R. Kurfess
Keyword(s):  
White Light ◽  
Three Dimensional ◽  
File Systems ◽  
Bottom Surface ◽  
White Light Interferometry ◽  
Planar Surfaces ◽  
Coordinate Metrology ◽  
Data Points ◽  
Part Inspection ◽  
Processing Techniques

Measurement of LIGA parts is critical for characterization and understanding of process variables. Traditionally, measurement using coordinate metrology consists of collecting data points from all of the surfaces of a part (e.g., three dimensional data) and comparing these points with target geometry as defined in a CAD file. Systems such as coordinate measurement machines and laser scanners are often used to collect the data. Unfortunately, three dimensional data collection has proven to be quite difficult for mesoscale parts, such as those created using the LIGA process. The inspection techniques used for larger parts cannot be used for parts of this scale because of physical limitations or poor resolution. This paper targets the use of white light interferometry for the analysis of micro-components produced using the LIGA and stereolithography processes. Both of these processes often create parts that are designed to have a constant cross section with planar top and bottom surfaces. Assuming this geometric relationship holds true, the analysis of just the top or bottom surface of the part can provide useful information pertaining to process capability and part geometry. White light interferometry is well-suited to the measurement of these planar surfaces. This paper will discuss techniques used to analyze two dimensional part parameters using white light interferometry in combination with image processing techniques. Several case studies are included to show the abilities of the measurement and processing methods.

scholarly journals Three-Dimensional Super-Resolution Morphology by Near-Field Assisted White-Light Interferometry

2016 ◽  
Vol 6 (1) ◽  
Author(s):  
Feifei Wang ◽  
Lianqing Liu ◽  
Peng Yu ◽  
Zhu Liu ◽  
Haibo Yu ◽  
...  
Keyword(s):  
White Light ◽  
Near Field ◽  
Three Dimensional ◽  
Super Resolution ◽  
White Light Interferometry

Fringe order identification in optical fibre white-light interferometry using centroid algorithm method

1992 ◽  
Vol 28 (6) ◽  
pp. 553 ◽  
Author(s):  
S. Chen ◽  
A.W. Palmer ◽  
K.T.V. Grattan ◽  
B.T. Meggitt
Keyword(s):  
Optical Fibre ◽  
White Light ◽  
White Light Interferometry ◽  
Fringe Order ◽  
Centroid Algorithm

scholarly journals Integrated, Speckle-Based Displacement Measurement for Lateral Scanning White Light Interferometry

Sensors ◽  
2021 ◽  
Vol 21 (7) ◽  
pp. 2486
Author(s):  
Gert Behrends ◽  
Dirk Stöbener ◽  
Andreas Fischer
Keyword(s):  
White Light ◽  
Lateral Displacement ◽  
Displacement Measurement ◽  
Accurate Information ◽  
White Light Interferometry ◽  
Fully Integrated ◽  
Speckle Correlation ◽  
Dsc Measurements ◽  
Scanning White Light Interferometry ◽  
The Impact

Lateral scanning white light interferometry (LSWLI) is a promising technique for high-resolution topography measurements on moving surfaces. To achieve resolutions typically associated with white light interferometry, accurate information on the lateral displacement of the measured surface is essential. Since the uncertainty requirement for a respective displacement measurement is currently not known, Monte Carlo simulations of LSWLI measurements are carried out at first to assess the impact of the displacement uncertainty on the topography measurement. The simulation shows that the uncertainty of the displacement measurement has a larger influence on the total height uncertainty than the uncertainty of the displacing motion itself. Secondly, a sufficiently precise displacement measurement by means of digital speckle correlation (DSC) is proposed that is fully integrated into the field of view of the interferometer. In contrast to externally applied displacement measurement systems, the integrated combination of DSC with LSWLI needs no synchronization and calibration, and it is applicable for translatory as well as rotatory scans. To demonstrate the findings, an LSWLI setup with integrated DSC measurements is realized and tested on a rotating cylindrical object with a surface made of a linear encoder strip.

Polarization insensitive fibre-optic white-light interferometry

1995 ◽  
Vol 114 (5-6) ◽  
pp. 386-392 ◽  
Author(s):  
L.A Ferreira ◽  
J.L Santos ◽  
F Farahi
Keyword(s):  
White Light ◽  
Fibre Optic ◽  
White Light Interferometry ◽  
Polarization Insensitive

Fiber-optic white-light interferometry: lead sensitivity considerations

1994 ◽  
Vol 19 (2) ◽  
pp. 138 ◽  
Author(s):  
R. R. Gauthier ◽  
N. Dahi ◽  
F. Farahi
Keyword(s):  
White Light ◽  
Fiber Optic ◽  
White Light Interferometry

A White-Light Interferometry for the Measurement of High-Finesse Fiber Optic EFPI Sensors

2014 ◽  
Vol 26 (21) ◽  
pp. 2138-2141 ◽  
Author(s):  
Zhen Wang ◽  
Yi Jiang ◽  
Wenhui Ding ◽  
Ran Gao
Keyword(s):  
White Light ◽  
Fiber Optic ◽  
White Light Interferometry ◽  
High Finesse

Improved synthesised source for white light interferometry

1994 ◽  
Vol 30 (17) ◽  
pp. 1440-1441 ◽  
Author(s):  
Y.J. Rao ◽  
D.A. Jackson
Keyword(s):  
White Light ◽  
White Light Interferometry
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