High-current discharge pumping of ArF, F 2 lasers without cathode hot spots and filament instabilities
Keyword(s):
2007 ◽
Vol 73
(6)
◽
pp. 682-687
◽
2020 ◽
Vol 167
(14)
◽
pp. 140549
Keyword(s):
Keyword(s):
Keyword(s):
2016 ◽
pp. 5-10