Enhancement of multilayer-coated normal incidence gratings in the extreme ultraviolet using a CN x smoothing layer
1972 ◽
Vol 14
◽
pp. 668-669
1990 ◽
Vol 123
◽
pp. 177-184
1972 ◽
Vol 14
◽
pp. 612-637
1972 ◽
Vol 14
◽
pp. 531-531
1974 ◽
Vol 57
◽
pp. 497-500
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