Use of beam parameters in optical component testing

2001 ◽  
Author(s):  
Daniel R. Neal ◽  
James K. Gruetzner ◽  
James P. Roller
Keyword(s):  
Optical Component ◽  
Component Testing ◽  
Beam Parameters

scholarly journals A large-aperture high-energy laser system for optics and optical component testing

2004 ◽  
Author(s):  
Mike C. Nostrand ◽  
Timothy L. Weiland ◽  
Ronald L. Luthi ◽  
James L. Vickers ◽  
Walter D. Sell ◽  
...  
Keyword(s):  
Laser System ◽  
High Energy ◽  
Optical Component ◽  
Large Aperture ◽  
Component Testing ◽  
Energy Laser ◽  
High Energy Laser

Using Statistical Methods to Optimize Patterning Parameters for Tungsten Deposition

2007 ◽  
Author(s):  
Michael DiBattista ◽  
Kimball Skinner ◽  
Rick Kneedler ◽  
Leonid Vasilvey ◽  
Lukas Drybcak ◽  
...  
Keyword(s):  
Failure Analysis ◽  
Statistical Methods ◽  
Deposition Rates ◽  
Low Resistivity ◽  
Material Deposition ◽  
Deposition Parameters ◽  
Beam Parameters

Abstract Circuit edit and failure analysis require tungsten deposition parameters to accomplish different goals. Circuit edit applications desire low resistivity values for rewiring, while failure analysis requires high deposition rates for capping layers. Tungsten deposition can be a well controlled process for a variety of beam parameters. For circuit edit, tungsten resistivity approaching below 150 µohm-cm and 50 μm3/nC is predicted. Material deposition rates of 80 μm3/nC can be achieved with reasonable pattern accuracy using defocus as a parameter.

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