Optical near-field phase singularities produced by microstructures

2001 ◽  
Author(s):  
Antonello Nesci ◽  
Rene Daendliker ◽  
Martin Salt ◽  
Hans Peter Herzig
Keyword(s):  
Near Field ◽  
Field Phase ◽  
Phase Singularities

The FDTD Analysis of Near-Field Response for Microgroove Structure With Standing Wave Illumination for the Realization of Coherent Structured Illumination Microscopy

2021 ◽  
Author(s):  
Yizhao Guan ◽  
Hiromasa Kume ◽  
Shotaro Kadoya ◽  
Masaki Michihata ◽  
Satoru Takahashi
Keyword(s):  
Standing Wave ◽  
Incident Angle ◽  
Near Field ◽  
Super Resolution ◽  
Structured Illumination ◽  
Field Phase ◽  
Structured Illumination Microscopy ◽  
Depth Measurement ◽  
Field Response ◽  
Depth Dependency

Abstract Microstructures are widely used in the manufacture of functional surfaces. An optical-based super-resolution, non-invasive method is preferred for the inspection of surfaces with massive microstructures. The Structured Illumination Microscopy (SIM) uses standing-wave illumination to reach optical super-resolution. Recently, coherent SIM is being studied. It can obtain not only the super-resolved intensity distribution but also the phase and amplitude distribution of the sample surface beyond the diffraction limit. By analysis of the phase-depth dependency, the depth measurement for microgroove structures with coherent SIM is expected. FDTD analysis is applied for observing the near-field response of microgroove under the standing-wave illumination. The near-field phase shows depth dependency in this analysis. Moreover, the effects from microgroove width, the incident angle, and the relative position between the standing-wave peak and center of the microgroove are investigated. It is found the near-field phase change can measure depth until 200 nm (aspect ratio 1) with an error of up to 20.4 nm in the case that the microgroove width is smaller than half of the wavelength.

THE FDTD ANALYSIS OF NEAR-FIELD RESPONSE FOR MICROGROOVE STRUCTURE WITH STANDING WAVE ILLUMINATION FOR THE REALIZATION OF COHERENT STRUCTURED ILLUMINATION MICROSCOPY

2021 ◽  
pp. 1-4
Author(s):  
Yizhao Guan ◽  
Hiromasa Kume ◽  
Shotaro Kadoya ◽  
Masaki Michihata ◽  
Satoru Takahashi
Keyword(s):  
Standing Wave ◽  
Incident Angle ◽  
Near Field ◽  
Super Resolution ◽  
Structured Illumination ◽  
Field Phase ◽  
Structured Illumination Microscopy ◽  
Depth Measurement ◽  
Field Response ◽  
Depth Dependency

Abstract Microstructures are widely used in the manufacture of functional surfaces. An optical-based super-resolution, non-invasive method is preferred for the inspection of surfaces with massive microstructures. The Structured Illumination Microscopy (SIM) uses standing-wave illumination to reach optical super-resolution. Recently, coherent SIM is being studied. It can obtain not only the super-resolved intensity distribution but also the phase and amplitude distribution of the sample surface beyond the diffraction limit. By analysis of the phase-depth dependency, the depth measurement for microgroove structures with coherent SIM is expected. FDTD analysis is applied for observing the near-field response of microgroove under the standing-wave illumination. The near-field phase shows depth dependency in this analysis. Moreover, the effects from microgroove width, the incident angle, and the relative position between the standing-wave peak and center of the microgroove are investigated. It is found the near-field phase change can measure depth until 200 nm (aspect ratio 1) with an error of up to 20.4 nm in the case that the microgroove width is smaller than half of the wavelength.

Near-field phase-change optical recording over 1.2 numerical aperture

1999 ◽  
Author(s):  
Koichiro Kishima ◽  
Yuji Kuroda ◽  
Kimihiro Saito ◽  
Kiyoshi Osato ◽  
Kenji Yamamoto ◽  
...  
Keyword(s):  
Phase Change ◽  
Near Field ◽  
Numerical Aperture ◽  
Optical Recording ◽  
Field Phase

scholarly journals Electromagnetic modeling of near-field phase-shifting contact lithography with broadband ultraviolet illumination

Optik ◽  
2005 ◽  
Vol 116 (1) ◽  
pp. 1-9 ◽  
Author(s):  
Fei Wang ◽  
Katherine E. Weaver ◽  
Akhlesh Lakhtakia ◽  
Mark W. Horn
Keyword(s):  
Near Field ◽  
Phase Shifting ◽  
Electromagnetic Modeling ◽  
Field Phase ◽  
Ultraviolet Illumination
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