Three-dimensional full-field dynamical characterization of micromechanical devices by stroboscopic white light scanning interferometry
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1992 ◽
Vol 50
(2)
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pp. 1146-1147
1987 ◽
Vol 45
◽
pp. 30-33
1996 ◽
Vol 54
◽
pp. 636-637
1994 ◽
Vol 52
◽
pp. 760-761
1998 ◽
Vol 79
(01)
◽
pp. 104-109
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