Optical measurement methods to study dynamic behavior in MEMS
2015 ◽
Vol 713-715
◽
pp. 395-401
1997 ◽
Vol 29
(10)
◽
pp. 1393
2014 ◽
Vol 672-674
◽
pp. 1481-1484
2014 ◽
Vol 54
◽
pp. 139-140
◽
2006 ◽
Vol 40
(20)
◽
pp. 6377-6383
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