Innovative techniques for automatic multi-CD-SEM image quality monitoring and matching

2001 ◽  
Author(s):  
Haiqing Zhou ◽  
Chih-Yu Wang ◽  
Joseph P. Pratt
Author(s):  
Jean-Louis Raynaud ◽  
Bernard Specht ◽  
Philippe Crebassol ◽  
Philippe Gamet ◽  
Françoise De Lussy ◽  
...  

1999 ◽  
Author(s):  
Pierre Bretillon ◽  
Jamal Baina ◽  
Michel Jourlin ◽  
Gabriel Goudezeune

2013 ◽  
Author(s):  
Naoki Fukuda ◽  
Yuta Chihara ◽  
Soichi Shida ◽  
Keisuke Ito

2021 ◽  
Vol E104.D (2) ◽  
pp. 341-345
Author(s):  
Zhaolin LU ◽  
Ziyan ZHANG ◽  
Yi WANG ◽  
Liang DONG ◽  
Song LIANG

2021 ◽  
Author(s):  
Nivea G. Schuch ◽  
Alexandre Moly ◽  
Charles Valade ◽  
Nassim Halli ◽  
Mohamed Abaidi ◽  
...  

2013 ◽  
Vol 820 ◽  
pp. 92-96 ◽  
Author(s):  
Zhi Gang Wang ◽  
Min Jing ◽  
Teng Teng Yao ◽  
Ke Gao Liu

The surface morphology of the Al2O3powder was observed by SEM and the composition content was analyzed by EDS spectrum under different vacuum level condition. The effects of the atmosphere pressure on the SEM image quality and EDS analysis were explored systematically. The platinum sputtering treatment on the materials surface in high vacuum mode is beneficial to the observation of the images but has negtive effects on the analysis of O and Al elements. The decrease of vacuum degree in low vacuum mode can result in the drop of the image resolution and EDS spectrum accuracy. However, clear SEM image and EDS composition analysis result near to the real element kinds and contents of sample can be obtained in the low vacuum mode of 1Pa~50Pa.


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