Investigation of regimes of structural defect accumulation and relaxation on silicon surface under periodic-pulse laser radiation
Keyword(s):
2020 ◽
Vol 1698
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pp. 012017
Keyword(s):
2016 ◽
Vol 7
(3)
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pp. 286-295
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Keyword(s):
1977 ◽
Vol 7
(7)
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pp. 875-876
Keyword(s):
2009 ◽
Vol 51
(5-6)
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pp. 195-203
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