Modeling of micro-optical systems by using nonsequential ray tracing

2001 ◽  
Author(s):  
Sanna M. Aikio ◽  
Chen Liang ◽  
Jukka-Tapani Maekinen ◽  
Juha T. Rantala ◽  
Michael R. Descour
Keyword(s):  
Ray Tracing ◽  
Optical Systems

scholarly journals Coherent Ray Tracing Simulation Of Non-Imaging Laser Beam Shaping With Multi-Aperture Elements

2019 ◽  
Vol 215 ◽  
pp. 01001
Author(s):  
Raoul Kirner ◽  
Wilfried Noell ◽  
Toralf Scharf ◽  
Reinhard Voelkel
Keyword(s):  
Ray Tracing ◽  
Continuous Wave ◽  
Laser Light ◽  
Traditional Approach ◽  
Statistical Treatment ◽  
Diffraction Theory ◽  
Beam Shaping ◽  
Optical Systems ◽  
Light Sources ◽  
Mask Aligner

The application of laser light sources for illumination tasks like in mask aligner lithography relies on non-imaging optical systems with multi-aperture elements for beam shaping. When simulating such systems, the traditional approach is to separate the beam-shaping part (incoherent simulation) from dealing with coherence properties of the illuminating laser light source (diffraction theory with statistical treatment). We present an approach using Gaussian beam decomposition to include coherence simulation into ray tracing, combining these two parts, to get a complete picture in one simulation. We discuss source definition for such simulations, and verify our assumptions on a well-known system. We then apply our approach to an imaging beam shaping setup with microoptical multi-aperture elements. We compare the simulation to measurements of a similar beam-shaping setup with a 193 nm continuous-wave laser in a mask-aligner configuration.

Automatic design of optical systems using a set of general skew ray tracing formulas

1988 ◽  
Vol 27 (8) ◽  
pp. 1574 ◽  
Author(s):  
You-Wen Zhang ◽  
Mo-Jun Chang ◽  
Cu-Wu Yang ◽  
Hai-Cheng Tu
Keyword(s):  
Ray Tracing ◽  
Optical Systems ◽  
Automatic Design

Ray-tracing analysis of planar optical systems

2000 ◽  
Author(s):  
Ralf Bathel ◽  
Stefan Sinzinger ◽  
Jürgen Jahns
Keyword(s):  
Ray Tracing ◽  
Optical Systems

scholarly journals Ray tracing in thermally loaded optical systems

PAMM ◽  
2021 ◽  
Vol 21 (1) ◽  
Author(s):  
Phillip Lino Rall ◽  
Christoph Pflaum
Keyword(s):  
Ray Tracing ◽  
Optical Systems

Reverse ray tracing method for estimating the illumination from outside the field of view of optical systems

2018 ◽  
Vol 85 (1) ◽  
pp. 32
Author(s):  
A. A. Abakumova ◽  
T. P. Malinova ◽  
P. A. Medennikov ◽  
N. I. Pavlov
Keyword(s):  
Ray Tracing ◽  
Field Of View ◽  
Optical Systems ◽  
Ray Tracing Method ◽  
Tracing Method
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