Preparation and characterization of excimer-laser-ablation-derived lead zirconate titanate thin films for microactuators

2001 ◽  
Author(s):  
Zhanjie Wang ◽  
Ryutaro Maeda ◽  
Hiroyuki Kokawa
Keyword(s):  
Thin Films ◽  
Laser Ablation ◽  
Excimer Laser ◽  
Lead Zirconate Titanate ◽  
Lead Zirconate ◽  
Excimer Laser Ablation ◽  
Zirconate Titanate

Pulsed excimer laser deposition and characterization of ferroelectric Pb(Zr0.52Ti0.48)O3 thin films

1992 ◽  
Vol 7 (9) ◽  
pp. 2521-2529 ◽  
Author(s):  
D. Roy ◽  
S.B. Krupanidhi
Keyword(s):  
Thin Films ◽  
Excimer Laser ◽  
Lead Zirconate Titanate ◽  
Fatigue Behavior ◽  
Lead Zirconate ◽  
Laser Deposition ◽  
Silicon Substrates ◽  
Excimer Laser Ablation ◽  
Pzt Films

Lead zirconate titanate (PZT) thin films were prepared by excimer laser ablation on platinum coated silicon substrates. The composition of the films showed dependence on the fluence at low energy densities (<2 J/cm2), and less dependence on the ablation fluence was observed beyond a fluence of 2 J/cm2. A correlation among the fluence, ablation pressure, and substrate temperature has been established. Crystalline perovskite PZT films showed a dielectric constant of 800–1000, a remnant polarization of 32 μC/cm2, and a coercive field of 130 kV/cm. Films showed fatigue behavior that may be used in a device, and a close comparison of fatigue behavior between the films deposited at different energy densities indicated a better fatigue behavior for a fluence of 4 J/cm2.

Synthesis and Characterization of Ferroelectric Thin Films by KrF Excimer Laser Ablation for Memory Applications

1998 ◽  
Vol 526 ◽  
Author(s):  
Ashok Kumar ◽  
M.R. Alam
Keyword(s):  
Thin Films ◽  
Laser Ablation ◽  
Excimer Laser ◽  
Lead Zirconate Titanate ◽  
Laser Energy ◽  
Ferroelectric Thin Film ◽  
Lead Zirconate ◽  
Test System ◽  
Excimer Laser Ablation ◽  
Krf Excimer Laser

AbstractPb(ZrxTi1-x)O3 (lead zirconate titanate or PZT) ferroelectric thin film capacitors are of considerable interest for the realization of memory devices such as nonvolatile random access memories (NVRAMs). The PZT capacitors were prepared on platinized silicon Pt/(100)Si using conducting oxide LaxSr1-xCoO3 (lanthanum strontium cobalt oxide or LSCO) as electrodes. The PZT and LSCO thin films were deposited by the KrF excimer laser ablation technique. The optimum preparation conditions such as oxygen pressure, laser energy influence and substrate temperature were investigated. The PZT and LSCO films grown on Pt/(100)Si are polycrystalline. The crystallographic properties of the films were determined using X-ray diffractometer (XRD) method. The electrical characterizations of the films including hysteresis loop, fatigue, and retention properties were determined by the RT66A Standardized Ferroelectric Test System.

scholarly journals Ferroelectricity of Lead-Zirconate-Titanate Thin Films Prepared by Laser Ablation

1991 ◽  
Vol 243 ◽  
Author(s):  
Toshio Ogawa ◽  
Hideo Kidoh ◽  
Hideyuki Yashima ◽  
Akiharu Morimoto ◽  
Tatsuo Shimizu
Keyword(s):  
Thin Films ◽  
Laser Ablation ◽  
Lead Zirconate Titanate ◽  
Remanent Polarization ◽  
Lead Zirconate ◽  
Excimer Laser Ablation ◽  
Sapphire Substrates ◽  
Zirconate Titanate ◽  
Effective Voltage ◽  
Large Remanent Polarization

AbstractLead-zirconate-titanate films were prepared by excimer laser ablation. The coercive field of films deposited on MgO substrates with an electrode was lower than that of films deposited on sapphire substrates. Laser fluence influenced the grain and crystalline size, resulting in a change in the Ec. Film thicknesses were varied over a range from 0.3 to 2.41μm, with the thinnest film showing a large remanent polarization even at an applied effective voltage of 5V.

Lead Zirconate-Titanate Thin Films Prepared by the Laser Ablation Technique

1990 ◽  
Vol 200 ◽  
Author(s):  
C. K. Chiang ◽  
L. P. Cook ◽  
P. K. Schenck ◽  
P. S. Brody ◽  
J. M. Benedetto
Keyword(s):  
Thin Films ◽  
Laser Ablation ◽  
Lead Zirconate Titanate ◽  
Lead Zirconate ◽  
X Ray ◽  
Ablation Technique ◽  
Zirconate Titanate ◽  
Deposited Films ◽  
Plate Type ◽  
Laser Ablation Technique

ABSTRACTLead zirconate-titanate (PZT) thin films were prepared by the laser ablation technique. The PZT (Zr/Ti=53/47) target was irradiated using a focused q-switched Nd:YAG laser (15 ns, 100 mJ at 1.064 μ;m). The as-deposited films were amorphous as indicated by X-ray powder patterns, but crystallized readily with brief annealing above 650°C. The dielectric constant and the resistivity of the crystallized films were studied using a parallel-plate type capacitor structure.

Characterization of C-N thin films deposited by reactive excimer laser ablation of graphite targets in nitrogen atmosphere

1997 ◽  
Vol 307 (1-2) ◽  
pp. 54-59 ◽  
Author(s):  
A.P. Caricato ◽  
G. Leggieri ◽  
A. Luches ◽  
A. Perrone ◽  
E. Gyorgy ◽  
...  
Keyword(s):  
Thin Films ◽  
Laser Ablation ◽  
Excimer Laser ◽  
Nitrogen Atmosphere ◽  
Excimer Laser Ablation

Characterization of Sputtered Lead-Zirconate-Titanate Thin Films with Various Compositions

1999 ◽  
Vol 38 (Part 1, No. 6A) ◽  
pp. 3600-3603 ◽  
Author(s):  
Tomoyuki Sakoda ◽  
Katsuhiro Aoki ◽  
Yukio Fukuda
Keyword(s):  
Thin Films ◽  
Lead Zirconate Titanate ◽  
Lead Zirconate ◽  
Zirconate Titanate

Characterization of seeded sol–Gel lead zirconate titanate thin films

1999 ◽  
Vol 19 (6-7) ◽  
pp. 1403-1407 ◽  
Author(s):  
Aiying Wu ◽  
Paula M. Vilarinho ◽  
Isabel M.Miranda Salvado ◽  
João L. Baptista ◽  
C.M. de Jesus ◽  
...  
Keyword(s):  
Thin Films ◽  
Lead Zirconate Titanate ◽  
Sol Gel ◽  
Lead Zirconate ◽  
Zirconate Titanate
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