Dense plasma focus radiation source for microlithography and micromachining

Author(s):  
Vladimir A. Gribkov ◽  
Mahe Liu ◽  
Paul C. K. Lee ◽  
Sing Lee ◽  
Ashutosh M. Srivastava
2014 ◽  
Vol 511 ◽  
pp. 012024 ◽  
Author(s):  
L Supán ◽  
S Guichón ◽  
M Milanese ◽  
J Niedbalski ◽  
R Moroso ◽  
...  

2002 ◽  
Vol 30 (3) ◽  
pp. 1331-1338 ◽  
Author(s):  
V.A. Gribkov ◽  
A. Srivastava ◽  
P.L.C. Keat ◽  
V. Kudryashov ◽  
S. Lee

2016 ◽  
Vol 113 ◽  
pp. 109-118 ◽  
Author(s):  
M. Chernyshova ◽  
V.A. Gribkov ◽  
E. Kowalska-Strzeciwilk ◽  
M. Kubkowska ◽  
R. Miklaszewski ◽  
...  

Author(s):  
A. Schmidt ◽  
E. Anaya ◽  
M. Anderson ◽  
J. Angus ◽  
S. Chapman ◽  
...  

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