Dense plasma focus radiation source for microlithography and micromachining
Keyword(s):
Keyword(s):
2014 ◽
Vol 511
◽
pp. 012024
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2002 ◽
Vol 30
(3)
◽
pp. 1331-1338
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Keyword(s):
Interaction of powerful hot plasma and fast ion streams with materials in dense plasma focus devices
2016 ◽
Vol 113
◽
pp. 109-118
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2018 ◽
Vol 99
(9-12)
◽
pp. 2717-2725