Minimum-time optimal feedforward control of conductive heating systems for microelectronics processing of silicon wafers and quartz photomasks
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2001 ◽
Vol 14
(4)
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pp. 381-386
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2012 ◽
Vol 28
(2)
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pp. 351-363
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1989 ◽
Vol 80
(1)
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pp. 225-231
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2017 ◽
Vol 28
(04)
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pp. 321-333
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