Electromechanical simulation of a large-aperture MOEMS Fabry-Perot tunable filter
2012 ◽
Vol 132
(2)
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pp. 25-30
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Keyword(s):
2010 ◽
Vol 53
(2)
◽
pp. 242-245
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2011 ◽
Vol 276
◽
pp. 012079
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2017 ◽