Precise control of critical dimension shrinkage and enlargement by in-situ polysilicon etch

2000 ◽  
Author(s):  
Kung Linliu ◽  
Mai-Rue Kuo
Keyword(s):  
Critical Dimension ◽  
Precise Control

The Formation of an Epitaxial-Graphene Cap Layer for Post-Implantation High Temperature Annealing of SiC and its In Situ Removal by Si-Vapor Etching

2011 ◽  
Vol 679-680 ◽  
pp. 777-780 ◽  
Author(s):  
Shoji Ushio ◽  
Ayumu Adachi ◽  
Kazuhiro Matsuda ◽  
Noboru Ohtani ◽  
Tadaaki Kaneko
Keyword(s):  
High Temperature ◽  
Graphene Layer ◽  
Treatment Method ◽  
Etch Depth ◽  
High Temperature Annealing ◽  
Large Area ◽  
Vapor Flux ◽  
Precise Control ◽  
Post Implantation

As a new graphene functionality applicable to post-implantation high temperature annealing of SiC, a method of in situ formation and removal of large area epitaxial few-layer graphene on 4H-SiC(0001) Si-face is proposed. It is demonstrated that the homogeneous graphene layer formed by Si sublimation can be preserved without the decomposition of the underlying SiC substrate even in the excess of 2000 oC in ultrahigh vacuum. It is due to the existence of the stable (6√3×6√3) buffer layer at the interface. To ensure this cap function, the homogeneity of the interface must be guaranteed. In order to do that, precise control of the initial SiC surface flatness is required. Si-vapor etching is a simple and versatile SiC surface pre/post- treatment method, where thermally decomposed SiC surface is compensated by a Si-vapor flux from Si solid source in the same semi-closed TaC container. While this Si-vapor etching allows precise control of SiC etch depth and surface step-terrace structures, it also provides a “decap” function to remove of the graphene layer. The surface properties after the each process were characterized by AFM and Raman spectroscopy.

Importance of choosing the right polymerization method for in situ preparation of semiconducting nanoparticles from the P3HT block copolymer

2016 ◽  
Vol 7 (46) ◽  
pp. 7135-7141 ◽  
Author(s):  
In-Hwan Lee ◽  
Tae-Lim Choi
Keyword(s):  
Block Copolymer ◽  
Molecular Level ◽  
Precise Control ◽  
Semiconducting Nanoparticles ◽  
In Situ Preparation ◽  
The Right ◽  
Polymerization Method

Precise control on synthesis of P3HT-b-PT at the molecular level promotes more controlled in situ nanoparticlization to give more well-defined nanostructures.

Effects of Additive Gas on SiO2 Etching

1992 ◽  
Vol 279 ◽  
Author(s):  
Yasuhiro Miyakawa ◽  
Jun Hashimoto ◽  
Naokatsu Ikegami ◽  
Jun Kanamori
Keyword(s):  
Integrated Circuit ◽  
Vertical Profile ◽  
Etch Rate ◽  
Critical Dimension ◽  
Key Technology ◽  
Precise Control ◽  
Heavily Doped ◽  
Etched Surface ◽  
Sio2 Etching

ABSTRACTPrecise control of critical dimension(CD) loss (defined as the length of the top of contact hole minus the bottom of resist in this paper) and etched profile of contact holes is a key technology in the fabrication of Ultra Large Scaled Integrated Circuit(ULSI). In case of fine contact hole etching, small CD loss and vertical profile is essential. We have found out that N2 addition to Ar/CHF3/CF4 sharpens etched profile with CD loss kept small. And N2 addition also increases etch rate without a heavy deterioration of selectivity of SiO2 versus heavily doped n-type poly cry stall ine Si(n+ poly Si). Mechanisms of changes in etching characteristics have been investigated and discussed with the emphasis on adlayer formed on etched surface.

scholarly journals Precise control and measurement of solid–liquid interfacial temperature and viscosity using dual-beam femtosecond optical tweezers in the condensed phase

2016 ◽  
Vol 18 (37) ◽  
pp. 25823-25830 ◽  
Author(s):  
Dipankar Mondal ◽  
Paresh Mathur ◽  
Debabrata Goswami
Keyword(s):  
Optical Tweezers ◽  
Condensed Phase ◽  
Precise Control ◽  
Dual Beam ◽  
Novel Method ◽  
Interfacial Temperature ◽  
Solid Liquid Interface ◽  
Solid Liquid ◽  
And Control

We present a novel method of microrheology based on femtosecond optical tweezers, which in turn enables us to directly measure and controlin situtemperature at microscale volumes at the solid–liquid interface.

scholarly journals Bioorthogonal Photo-Catalytic Activation of an Anti-Cancer Prodrug by Riboflavin

2021 ◽  
Author(s):  
Xin Yang ◽  
Limin Ma ◽  
Hongwei Shao ◽  
Xia Ling ◽  
Mengyu Yao ◽  
...  
Keyword(s):  
Side Effects ◽  
Cancer Treatment ◽  
Density Functional ◽  
Cancer Drug ◽  
Spatiotemporal Resolution ◽  
Precise Control ◽  
Catalytic Activation ◽  
Anti Cancer

Chemotherapies for cancer treatment usually suffer from poor targeting ability and serious side-effects. To improve the treatment efficiency and reduce side effects, photoactivatable chemotherapy has been recently proposed for precise cancer treatment with high spatiotemporal resolution. However, most photoactivatable prodrugs require decoration by stoichiometric photo-cleavable groups, which are only responsive to ultraviolet irradiation and suffer from low reaction efficiency. To tackle these challenges, we herein propose a bioorthogonal photo-catalytic activation strategy with riboflavin as the catalyst for in situ transformation of prodrug dihydrochelerythrine (DHCHE) prodrug into anti-cancer drug chelerythrine (CHE), which can efficiently kill cancer cells and inhibit in vivo tumor growth under light irradiation. Meanwhile, the photo-catalytic transformation from DHCHE into CHE was in situ monitored by green-to-red fluorescence conversion, which can be used for precise control of the therapeutic dose. The photocatalytic mechanism was also fully explored by means of density functional theory (DFT) calculations. We believe this imaging-guided bioorthogonal photo-catalytic activation strategy is promising for cancer chemotherapy in clinical applications.

Recent development of an in-situ image detecting system for floc characterization and monitoring

2010 ◽  
Vol 61 (11) ◽  
pp. 2699-2706
Author(s):  
Wang Dongsheng ◽  
Feng Jiang ◽  
Xie Jiankun ◽  
Xu Xuzheng ◽  
Yao Chonghua ◽  
...  
Keyword(s):  
Wastewater Treatment ◽  
Average Diameter ◽  
Ann Model ◽  
Water And Wastewater Treatment ◽  
Precise Control ◽  
Coagulation Process ◽  
Aggregation Behaviour ◽  
Coagulant Dosage ◽  
Water And Wastewater

Coagulation control plays a significant role in the final yield of sludge volume during water and wastewater treatment. The precise control of coagulant dosage, floc formation and aggregation behaviour becomes the important target for the coagulation process both in water and wastewater treatment. A critical review is presented first in this paper on the recent advances in coagulation control. In particular, the development of an in-situ image detecting system (IDS) based on characterization of floc properties, involving average diameter, fractal dimension and apparent strength is discussed. The results show that the data obtained from the IDS are generally in accordance with the outcome of common coagulation experiment, and have sensitivity for the slow stirring rate, raw water turbidity and coagulant dosage, in different degrees. The combination of IDS and ANN model is also discussed. This provides a possibility for applying the proposed IDS to control the coagulation process in water and wastewater treatment.

scholarly journals Visualization of Iron-Binding Micelles in Acidic Recombinant Biomineralization Protein, MamC

2014 ◽  
Vol 2014 ◽  
pp. 1-7 ◽  
Author(s):  
Sanjay Kashyap ◽  
Taylor Woehl ◽  
Carmen Valverde-Tercedor ◽  
Miguel Sánchez-Quesada ◽  
Concepción Jiménez López ◽  
...  
Keyword(s):  
Low Temperature ◽  
Self Assembly ◽  
Inorganic Nanoparticles ◽  
The Self ◽  
Synthetic Methods ◽  
Biological Macromolecules ◽  
Iron Binding ◽  
Precise Control ◽  
Iron Binding Protein

Biological macromolecules are utilized in low-temperature synthetic methods to exert precise control over nanoparticle nucleation and placement. They enable low-temperature formation of a variety of functional nanostructured materials with properties often not achieved via conventional synthetic techniques. Here we report on thein situvisualization of a novel acidic bacterial recombinant protein, MamC, commonly present in the magnetosome membrane of several magnetotactic bacteria, includingMagnetococcus marinus, strain MC-1. Our findings provide an insight into the self-assembly of MamC and point to formation of the extended protein surface, which is assumed to play an important role in the formation of biotemplated inorganic nanoparticles. The self-organization of MamC is compared to the behavior of another acidic recombinant iron-binding protein, Mms6.

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