Optimizing of thin-film interference effects in KrF lithography for 0.15-μm design rules

2000 ◽  
Author(s):  
Seung-Chul Oh ◽  
Young-Cheol Kim ◽  
Sang-Hoon Nah ◽  
Hoon Huh ◽  
Sang-Bum Han
Keyword(s):  
Thin Film ◽  
Interference Effects ◽  
Design Rules ◽  
Thin Film Interference

Thin-film interference effects for thin resist films on a broadband scanner

1998 ◽  
Author(s):  
James A. Bruce ◽  
Michael D. Caterer ◽  
Dianne L. Sundling
Keyword(s):  
Thin Film ◽  
Interference Effects ◽  
Thin Film Interference

Observing thin-film interference effects

2003 ◽  
Vol 38 (6) ◽  
pp. 495-496 ◽  
Author(s):  
C R Wheeler ◽  
R D Ramsier ◽  
P N Henriksen
Keyword(s):  
Thin Film ◽  
Interference Effects ◽  
Thin Film Interference

Thin-film interference effects on the efficiency of a normal-incidence grating in the 100–350-Å wavelength region

1999 ◽  
Vol 38 (7) ◽  
pp. 1251 ◽  
Author(s):  
John F. Seely ◽  
Leonid I. Goray ◽  
William R. Hunter ◽  
Jack C. Rife
Keyword(s):  
Thin Film ◽  
Wavelength Region ◽  
Normal Incidence ◽  
Interference Effects ◽  
Thin Film Interference

The impact of thin film interference effects on sub-micron lithography processing.

1990 ◽  
Vol 11 (1-4) ◽  
pp. 213-218 ◽  
Author(s):  
G.D. Maxwell ◽  
A.J.W. Tol ◽  
F.A. Vollenbroek ◽  
Y.F. Rody
Keyword(s):  
Thin Film ◽  
Interference Effects ◽  
Thin Film Interference ◽  
The Impact

Optical thin-film interference effects in microcantilevers

2004 ◽  
Vol 95 (3) ◽  
pp. 1162-1165 ◽  
Author(s):  
A. Wig ◽  
A. Passian ◽  
E. Arakawa ◽  
T. L. Ferrell ◽  
T. Thundat
Keyword(s):  
Thin Film ◽  
Interference Effects ◽  
Optical Thin Film ◽  
Thin Film Interference
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