Gel layer model for photoresist development

2000 ◽  
Author(s):  
Joon Yeon Cho ◽  
Se-Jin Choi ◽  
Byung-Uk Kim ◽  
Jung-Moon Park ◽  
Seung J. Lee
Keyword(s):  
1984 ◽  
Vol 20 (2) ◽  
pp. 115-124 ◽  
Author(s):  
J.G. Wijmans ◽  
S. Nakao ◽  
C.A. Smolders

1999 ◽  
Vol 7 (3) ◽  
pp. 313-321
Author(s):  
JOON YEON CHO ◽  
SEUNG JONG LEE ◽  
SE JIN CHOI
Keyword(s):  

2003 ◽  
Vol 263 (1) ◽  
pp. 84-98 ◽  
Author(s):  
Stuart Allison ◽  
Staffan Wall ◽  
Mikael Rasmusson

2008 ◽  
Author(s):  
Venkata M. Voora ◽  
Tino Hofmann ◽  
Matthias Brandt ◽  
Michael Lorenz ◽  
Marius Grundmann ◽  
...  

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